MICRO/NANO MULTIAXIAL INERTIAL SENSOR OF MOVEMENTS
First Claim
1. A multiaxial inertial sensor of movements comprising:
- a first sensor; and
a second sensor;
a coupling structure coupled in rotation around a Z axis and configured to induce transmission of movement between respectively;
the first sensor with a first excitation mass having a first degree of freedom in translation along a first excitation axis in a plane XY perpendicular to the Z axis; and
the second sensor with a second excitation mass having a second degree of freedom in translation along a second excitation axis of the plane XY, the second excitation axis of the second excitation mass being different from the first excitation axis of the first excitation mass.
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Abstract
The multiaxial inertial sensor of movements is a micro/nano sensor that makes it possible to couple at least one accelerometer with other structures, either accelerometers or gyroscopes, by an oscillating disk structure. The oscillating disk also forms an inertial sensor such as a gyrometer. This single-chip structure associating both gyroscopes and accelerometers makes it possible to achieve detections and measurements in up to 6 axes, in other words 3 accelerometer axes and 3 gyroscope axes, and to exert control by a single and unique electronic unit, thus permitting a single automatic control loop in excitation and a single electronic reading chip.
Application to technologies known as MEMS.
27 Citations
18 Claims
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1. A multiaxial inertial sensor of movements comprising:
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a first sensor; and a second sensor; a coupling structure coupled in rotation around a Z axis and configured to induce transmission of movement between respectively; the first sensor with a first excitation mass having a first degree of freedom in translation along a first excitation axis in a plane XY perpendicular to the Z axis; and the second sensor with a second excitation mass having a second degree of freedom in translation along a second excitation axis of the plane XY, the second excitation axis of the second excitation mass being different from the first excitation axis of the first excitation mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification