MICROFLOWMETER AND METHOD FOR MAKING SAME
1 Assignment
0 Petitions
Accused Products
Abstract
A flowmeter includes a first chamber and a second chamber connected through a channel. The first chamber is provided with a first deformable membrane and with first and second gauges. The second chamber is provided with a second deformable membrane and with third and fourth gauges. The four gauges form a Wheatstone bridge.
12 Citations
41 Claims
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1-20. -20. (canceled)
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21. A flowmeter, comprising:
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a first chamber and a second chamber connected through a channel, wherein the first chamber is provided with a wall including a first deformable membrane, which extends in the direction of flow of a fluid in the first chamber, and with first and second gauges, on or in the first deformable membrane, and the second chamber is provided with a wall including a second deformable membrane, which extends in the direction of flow of a fluid in the second chamber, and with third and fourth gauges, on or in the second deformable membrane, the four gauges forming a Wheatstone bridge with which a pressure difference between the first chamber and the second chamber may be measured when a fluid flows through the first chamber, and then through the channel, and then through the second chamber. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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Specification