ELECTROSTATIC CHUCK WITH RADIATIVE HEATING
First Claim
1. A system for holding and heating a workpiece, comprising:
- an electrostatic chuck, having a first surface for supporting said workpiece clamped to said first surface and a second surface opposite said first surface; and
one or more radiative heat sources proximate said second surface of said electrostatic chuck, emitting radiative heat within a predetermined frequency range, wherein said electrostatic chuck is comprised of a material that is optically transparent to at least a portion of said predetermined frequency range.
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Accused Products
Abstract
An electrostatic chuck is formed using materials that are optically transparent to a range of frequencies, such as infrared radiation. The invention discloses several methods for achieving optical transparency. The chuck electrode can be formed having a mesh pattern designed with a specific open area percentage to provide adequate wafer clamping force while still allowing sufficient levels of infrared radiation to pass through. Alternatively, the chuck electrode can also be made from a transparent conductive film. A workpiece is disposed on one surface of the chuck, and a radiative heat source is positioned on the opposite side of the chuck. A reflector plate may be used to reflect the infrared radiation toward the chuck and the wafer. The spacing of the radiation sources and the shape of the reflector plate may be modified to focus more radiation on a particular portion of the workpiece if desired.
10 Citations
19 Claims
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1. A system for holding and heating a workpiece, comprising:
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an electrostatic chuck, having a first surface for supporting said workpiece clamped to said first surface and a second surface opposite said first surface; and one or more radiative heat sources proximate said second surface of said electrostatic chuck, emitting radiative heat within a predetermined frequency range, wherein said electrostatic chuck is comprised of a material that is optically transparent to at least a portion of said predetermined frequency range. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An electrostatic chuck, comprising:
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an insulating layer comprising channels in its top surface; an electrically conductive material disposed in said channels, said electrically conductive material forming a mesh electrode; and
adielectric layer deposited on said insulating layer, wherein said insulating layer and said dielectric layer are optically transparent to a predetermined frequency range. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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Specification