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THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THE SAME, ARRAY SUBSTRATE AND DISPLAY DEVICE

  • US 20140061634A1
  • Filed: 12/13/2012
  • Published: 03/06/2014
  • Est. Priority Date: 02/27/2012
  • Status: Active Grant
First Claim
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1. A manufacturing method of a thin film transistor (TFT), comprising:

  • forming a gate electrode on a substrate;

    forming a gate insulating layer on the substrate formed with the gate electrode;

    forming an oxide semiconductor active layer, an etch stop layer and a source/drain electrode on the gate insulating layer;

    wherein the etch stop layer is obtained by an oxidation treatment.

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