GROUP III NITRIDE WAFER AND ITS PRODUCTION METHOD
First Claim
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1. A group III nitride wafer having composition of GaxAlyIn1-x-yN (0≦
- x≦
1, 0≦
x+y≦
1), wherein the both surfaces are roughened from a mechanical process and the surfaces are chemically treated to visually distinguish one surface from another.
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Abstract
The present invention discloses a group III nitride wafer such as GaN, AlN, InN and their alloys having one surface visually distinguishable from the other surface. After slicing of the wafer from a bulk crystal of group III nitride with a mechanical method such as multiple wire saw, the wafer is chemically etched so that one surface of the wafer is visually distinguishable from the other surface. The present invention also discloses a method of producing such wafers.
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22 Claims
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1. A group III nitride wafer having composition of GaxAlyIn1-x-yN (0≦
- x≦
1, 0≦
x+y≦
1), wherein the both surfaces are roughened from a mechanical process and the surfaces are chemically treated to visually distinguish one surface from another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
- x≦
- 14. A group III nitride wafer comprising a first layer and a second layer of damaged group III nitride on opposite faces of a third layer of highly oriented poly or single crystalline group III nitride, wherein the first and the second layer were formed through a mechanical process and the surface of the second layer is made visually distinguishable from the surface of the first layer by a chemical etching.
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