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CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY

  • US 20140063588A1
  • Filed: 03/04/2013
  • Published: 03/06/2014
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. An electromechanical device, comprising:

  • an array of structures, each structure including a first electrode layer and a movable layer having a second electrode layer and a reflective surface, the movable layer deformable in a direction towards the first electrode layer in response to a voltage applied across the first electrode layer and the second electrode layer;

    the first electrode layers of the array electrically connected in series in a first direction;

    the second electrode layers of the array electrically connected in series in a second direction; and

    a conductive bus structure electrically connected to either the first electrode layers in parallel with the electrical connections between the first electrode layers in the first direction, or the second electrode layers in parallel with the electrical connections between the second electrode layers in the second direction.

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