DETECTION METHOD FOR SUBSTANCE AND SYSTEM THEREOF

• US 20140065719A1
• Filed: 09/04/2012
• Published: 03/06/2014
• Est. Priority Date: 09/04/2012
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Chuang, Tzu-Sou, Kuo, Chi-Wen, Hung, Yu-Kun
• Granted Patent: US 9,714,887 B2
• Time in Patent Office: Days
• US Class Current: 436/149
• CPC Class Codes: G01N 1/2202 involving separation of sample components during sampling
• CPC Class Codes: G01N 21/82 producing a precipitate or turbidity
• CPC Class Codes: G01N 31/22 using chemical indicators G01N31/02 takes precedence

Abstract

A detection method for a substance and a system thereof are provided. The detection method for a substance contained in a sample includes providing a reagent in reaction with the substance to form a chelate; and pressurizing the substance to accumulate the chelate.

Claims

1. A detection method for a substance contained in a sample under detection, comprising steps of:

providing a reagent in reaction with the substance to form a chelate; and

pressurizing the substance to accumulate the chelate.

2. The detection method as claimed in claim 1 further comprising a step of analyzing the chelate, wherein the reagent is one of a solution and a testing piece and the pressurizing step is performed by a pump.

3. The detection method as claimed in claim 2, wherein the testing piece is a solid chelating agent.

4. The detection method as claimed in claim 1, wherein the providing step further comprises steps of:

providing a chromotropic acid as the reagent into a chamber; and

providing the sample containing the substance having a concentration into the chamber to react the substance with the chromotropic acid to form the chelate, and

the pressurizing step further comprises a step of;

performing cyclic pressurizations to raise the concentration of the substance to increase a reacting rate of the substance and accumulate the chelate.

5. The detection method as claimed in claim 4, wherein the acid providing step further comprises a step of providing a solution having the chromotropic acid in the chamber.

6. The detection method as claimed in claim 5, wherein the acid providing step further comprises a step of adding a buffer solution into the solution.

7. The detection method as claimed in claim 4, wherein the acid providing step further comprises a step of providing a testing piece with the chromotropic acid in the chamber.

8. The detection method as claimed in claim 4 further comprising a step of performing a decompression for the chamber, wherein the chelate is free from a reverse reaction after the decompression.

9. The detection method as claimed in claim 4 further comprising a step of analyzing the chelate, wherein the analyzing step is performed by an analyzing method being one selected from a group consisting of a titrimetric analysis, a pH value analysis, a conductivity analysis, a spectrum analysis and a combination thereof.

10. The detection method as claimed in claim 4 further comprising steps of taking image pixels of the chromotropic acid and the chelate to generate a pixel data and analyzing the pixel data.

11. The detection method as claimed in claim 4 further comprising a step of analyzing the formed chelate to determine the original concentration of the substance in the sample.

12. The detection method as claimed in claim 1, wherein the substance is an airborne molecular contaminant (AMC).

13. The detection method as claimed in claim 1 being applied to a scrubber efficiency measurement.

14. A detection method for a sample with a substance under detection, comprising steps of

providing a reagent in reaction with the sample;

fastening a reaction of the sample and the reagent; and

analyzing the reagent to determine whether the sample contains the substance.

15. The detection method as claimed in claim 14, wherein the fastening step is performed by a pressurization.

16. A detection system for a substance, comprising:

a chamber containing a reagent in reaction with the substance to form a chelate; and

a pumping device coupled to and performing cyclic pressurizations for the chamber to accumulate the chelate.

17. The detection system as claimed in claim 16 further comprising an automatic motor to drive the pumping device.

18. The detection system as claimed in claim 16 further comprising a computer to analyze the chelate.

19. The detection system as claimed in claim 16 further comprising a camera to take image pixels for the reagent and the chelate to generate a pixel data.

20. The detection method as claimed in claim 16, wherein the reagent further comprises a chromotropic acid.