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ANGULAR VELOCITY SENSOR

  • US 20140069189A1
  • Filed: 09/10/2013
  • Published: 03/13/2014
  • Est. Priority Date: 09/11/2012
  • Status: Active Grant
First Claim
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1. An angular velocity sensor comprising:

  • first and second mass bodies;

    a first frame provided at an outer side of the first and second mass bodies;

    a first flexible part respectively connecting the first and second mass bodies to the first frame;

    a second flexible part respectively connecting the first and second mass bodies to the first frame;

    a second frame provided at an outer side of the first frame;

    a third flexible part connecting the first and second frames to each other; and

    a fourth flexible part connecting the first and second frames to each other,wherein the first and second mass bodies are respectively disposed at both sides of the fourth flexible part.

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