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IMAGE PICKUP DEVICE AND METHOD OF MANUFACTURING THE SAME

  • US 20140070288A1
  • Filed: 09/11/2013
  • Published: 03/13/2014
  • Est. Priority Date: 09/11/2012
  • Status: Active Grant
First Claim
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1. An image pickup device, comprising:

  • a semiconductor substrate having a main surface;

    a photoelectric conversion part that is formed in a predetermined region in the semiconductor substrate and converts entering light into a charge;

    a gate electrode of a transfer transistor that is formed over a surface of the semiconductor substrate and transfers the charge generated in the photoelectric conversion part;

    a sidewall insulating film that covers a side wall face of the gate electrode and that includes apart extending from a part covering the side wall face and covering a surface of the photoelectric conversion part;

    an interlayer insulating film formed so as to cover the sidewall insulating film; and

    a waveguide that is formed so as to penetrate through the interlayer insulating film and to reach the sidewall insulating film, and guides light to the photoelectric conversion part.

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