Solar Cell Having Selective Emitter
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Abstract
The present invention provides a solar cell having a selective emitter structure on a doped silicon substrate. The silicon substrate is mono-crystalline or multi-crystalline. A plurality of trenches are formed at the illuminated side of the silicon substrate. After one-time diffusion doping, the silicon substrate is processed through selective etching. The region outside the trenches obtains a lower doping concentration, while the region of the trenches remains to be highly doped. Thus, a selective emitter structure is formed.
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Citations
28 Claims
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1-13. -13. (canceled)
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14. A method of fabricating a solar cell having a selective emitter at least comprising the following steps of:
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first forming a plurality of trenches on a first surface of a doped silicon substrate; then diffusing a dopant into the first surface so as to form a heavily doped layer on substantially all of the first surface; then forming barrier material only in the trenches; then selectively etching at least the first surface of the substrate so as to reduce a thickness of the heavily doped layer outside the trenches so as to form a lightly doped layer while the heavily doped layer remains in the trenches; and then removing the barrier material so as to define the heavily doped layer arranged in the trenches and the lightly doped layer in regions of the first surface outside the trenches. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification