NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE
First Claim
1. A non-volatile semiconductor memory device comprising:
- a stacked body having an impurity doped silicon layer and an interlayer insulating film alternately stacked on each other in which one layer of the impurity doped silicon layers is replaced with a conductive film enabling forming a metal oxide;
a hole penetrating the stacked body in a stacking direction;
a channel layer formed in the hole along the stacking direction of the stacked body;
a tunnel insulating film formed between an inner surface of the hole and the channel layer;
a charge trapping layer formed between the inner surface of the hole and the tunnel insulating film; and
a block insulating film formed between the inner surface of the hole and the charge trapping layer.
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Accused Products
Abstract
An embodiment includes: a stacked body having an impurity doped silicon layer and an interlayer insulating film alternately stacked on each other in which one layer of the impurity doped silicon layers is replaced with a conductive film enabling forming a metal oxide; a hole penetrating the stacked body in a stacking direction; a channel layer formed in the hole along the stacking direction of the stacked body; a tunnel insulating film formed between an inner surface of the hole and the channel layer; a charge trapping layer formed between the inner surface of the hole and the tunnel insulating film; and a block insulating film formed between the inner surface of the hole and the charge trapping layer.
31 Citations
20 Claims
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1. A non-volatile semiconductor memory device comprising:
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a stacked body having an impurity doped silicon layer and an interlayer insulating film alternately stacked on each other in which one layer of the impurity doped silicon layers is replaced with a conductive film enabling forming a metal oxide; a hole penetrating the stacked body in a stacking direction; a channel layer formed in the hole along the stacking direction of the stacked body; a tunnel insulating film formed between an inner surface of the hole and the channel layer; a charge trapping layer formed between the inner surface of the hole and the tunnel insulating film; and a block insulating film formed between the inner surface of the hole and the charge trapping layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for manufacturing a non-volatile semiconductor memory device comprising the steps of:
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forming a stacked body having an impurity doped silicon layer and an interlayer insulating film alternately stacked on each other in which one layer of the impurity doped silicon layers is replaced with a conductive film enabling forming a metal oxide; forming a mask pattern formed with an opening on the stacked body; processing the stacked body through the opening to form a hole penetrating the stacked body in a stacking direction; forming a block insulating film on an inner surface of the hole; forming a charge trapping layer on a surface of the block insulating film in the hole; forming a tunnel insulating film on a surface of the charge trapping layer in the hole; and forming a channel layer on a surface of the tunnel insulating film in the hole. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A method for manufacturing a non-volatile semiconductor memory device comprising the steps of:
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forming a stacked body having an impurity doped silicon layer and an impurity non-doped silicon layer alternately stacked on each other in which one layer of the impurity doped silicon layers is replaced with a conductive film enabling forming a metal oxide; forming a mask pattern formed with an opening on the stacked body; processing the stacked body through the opening to form a hole penetrating the stacked body in a stacking direction; removing the impurity non-doped silicon layer formed with the hole; filling an interlayer insulating film in a space from which the impurity non-doped silicon layer is removed; forming a block insulating film on an inner surface of the hole; forming a charge trapping layer on a surface of the block insulating film in the hole; forming a tunnel insulating film on a surface of the charge trapping layer in the hole; and forming a channel layer on a surface of the tunnel insulating film in the hole. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification