Wafer Level Embedded Heat Spreader
First Claim
1. A device comprising:
- a die disposed within a substrate at a first side of the substrate, and having a plurality of contact pads disposed on a first side of the die and exposed at the first side of the substrate, wherein the substrate contacts a portion of the first side of the die; and
a heat spreader disposed within the substrate at a second side of the substrate opposite the first side of the substrate, and in thermal contact with the die.
1 Assignment
0 Petitions
Accused Products
Abstract
Disclosed herein are a device having an embedded heat spreader and method for forming the same. A carrier substrate may comprise a carrier, an adhesive layer, a base film layer, and a seed layer. A patterned mask is formed with a heat spreader opening and via openings. Vias and a heat spreader may be formed in the pattern mask openings at the same time using a plating process and a die attached to the head spreader by a die attachment layer. A molding compound is applied over the die and heat spreader so that the heat spreader is disposed at the second side of the molded substrate. A first RDL may have a plurality of mounting pads and a plurality of conductive lines is formed on the molded substrate, the mounting pads may have a bond pitch greater than the bond pitch of the die contact pads.
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Citations
29 Claims
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1. A device comprising:
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a die disposed within a substrate at a first side of the substrate, and having a plurality of contact pads disposed on a first side of the die and exposed at the first side of the substrate, wherein the substrate contacts a portion of the first side of the die; and a heat spreader disposed within the substrate at a second side of the substrate opposite the first side of the substrate, and in thermal contact with the die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A device comprising:
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a die disposed within a substrate and having a plurality of contact pads disposed on a first side of the die, the contact pads having a surface substantially planar with the first side of the substrate, wherein the substrate contacts a portion of the first side of the die; a die attachment layer disposed adjacent to a second side of the die a heat spreader embedded within the substrate and having a first side disposed on the die attachment layer; and a first RDL having a first side disposed on the contact pads of the die. - View Dependent Claims (10, 11)
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12-20. -20. (canceled)
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21. A device comprising:
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a die embedded within a substrate and having portions of each of at least two sides in contact with the substrate, the die having a plurality of contact pads on a first side of the die, the plurality of contact pads exposed at the first side of the substrate; and a die attachment layer disposed adjacent to a second side of the die a heat spreader embedded within the substrate, a first side of the heat spreader exposed at a second side of the substrate opposite the first side of the substrate, and having a second side in thermal contact with the die, the second side of the heat spreader opposite the first side; and a first RDL having a portion of first side contacting on the contact pads of the die. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29)
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Specification