MULTI-AXIS, LARGE TILT ANGLE, WAFER LEVEL MICROMIRROR ARRAY FOR LARGE SCALE BEAM STEERING APPLICATIONS
First Claim
1. A system for reflecting or redirecting incident energy, comprising:
- a first substrate having a surface;
an array of energy reflecting elements disposed on the surface of the first substrate, wherein each energy reflecting element is controllably positionable through a reflector angle from between zero degrees to 90 degrees with respect to the substrate surface in response to a reflector angle control signal;
a second substrate on or in which the first substrate is controllably, azimuthally-rotatably disposed; and
at least one controller coupled to the system that provides at least one of a reflector angle control signal to at least one of the energy reflecting elements and an azimuth angle control signal to the second substrate,wherein the system is steerable in two dimensions,further wherein the system is in a power-consuming mode when changing at least one of the reflecting element angles and the second substrate azimuth angle, and in an idle mode when the reflecting elements and the second substrate are stationary.
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Accused Products
Abstract
A system 120 for reflecting or redirecting incident light, microwave or sound energy includes a first substrate 144 configured to support an array of reflective elements 130 that can be angularly displaced through a range of substantially 90 degrees in response to a reflector angle control signal and a controller programmed to generate the reflector angle control signal to achieve desired incident energy beam or wavefront re-direction. The reflective elements 130 preferably comprise MEMS micro-reflector elements hingedly or movably attached to the first substrate 130 and define a reflective surface that is aimed at the source of incident light, microwave or sound energy.
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Citations
9 Claims
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1. A system for reflecting or redirecting incident energy, comprising:
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a first substrate having a surface; an array of energy reflecting elements disposed on the surface of the first substrate, wherein each energy reflecting element is controllably positionable through a reflector angle from between zero degrees to 90 degrees with respect to the substrate surface in response to a reflector angle control signal; a second substrate on or in which the first substrate is controllably, azimuthally-rotatably disposed; and at least one controller coupled to the system that provides at least one of a reflector angle control signal to at least one of the energy reflecting elements and an azimuth angle control signal to the second substrate, wherein the system is steerable in two dimensions, further wherein the system is in a power-consuming mode when changing at least one of the reflecting element angles and the second substrate azimuth angle, and in an idle mode when the reflecting elements and the second substrate are stationary. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification