LOAD LOCK CHAMBER DESIGNS FOR HIGH-THROUGHPUT PROCESSING SYSTEM

• US 20140079514A1
• Filed: 09/17/2013
• Published: 03/20/2014
• Est. Priority Date: 09/18/2012
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: POLYAK, Alexander S., HENRICH, Juergen, L'HEUREUX, James, LANE, Christopher T., SCHLAEFER, Susanne, HOOG, Josef Thomas, AUGASON, Calvin R.
• Granted Patent: US 9,022,715 B2
• Time in Patent Office: Days
• US Class Current: 414/217
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/677 for conveying, e.g. between different workstations

Abstract

Methods and apparatus for transferring one or more substrates from a first pressure environment to a second pressure environment is provided. In one embodiment, a load lock chamber is provided. The load lock chamber comprises a first circular housing, and a second circular housing disposed within and movable relative to the first circular housing, one of the first circular housing or the second circular housing comprising a plurality of discrete regions, wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.

Claims

1. A load lock chamber, comprising:

a first circular housing; and

a second circular housing disposed within and movable relative to the first circular housing, the second circular housing comprising a conveyor, wherein one of the first circular housing or the second circular housing comprises a plurality of discrete regions, and wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.

2. The chamber of claim 1, wherein the at least two vacuum pumps are coupled to the first circular housing.

3. The chamber of claim 1, wherein the plurality of discrete regions are formed in the first circular housing.

4. The chamber of claim 3, wherein the first circular housing comprises a plurality of vacuum seals coupled thereto that are in sliding contact with a contact surface of the second circular housing.

5. The chamber of claim 1, wherein the plurality of discrete regions are formed in the second circular housing.

6. The chamber of claim 5, wherein each of the plurality of discrete regions includes a conveyor comprising a plurality of roller elements.

7. The chamber of claim 5, wherein each of the plurality of discrete regions comprises two conveyors that are each adapted to position a substrate that is disposed thereon.

8. The chamber of claim 7, wherein the two conveyors are positioned opposing each other in each of the plurality of discrete regions.

9. The chamber of claim 5, wherein the second circular housing comprises a plurality of vacuum seals coupled thereto that are in sliding contact with a contact surface of the first circular housing.

10. A load lock chamber, comprising:

a first stationary housing having a vacuum pump coupled thereto; and

a second movable housing disposed within a transfer region of the first stationary housing, the second circular housing comprising a conveyor, wherein one of the first stationary housing or the second movable housing comprises a plurality of discrete regions, and wherein at least a portion of the plurality of discrete regions are in selective fluid communication with the vacuum pump based on the angular position of the second movable housing relative to the first stationary housing.

11. The chamber of claim 10, wherein the first circular housing comprises an n number of discrete regions, n being equal to or greater than 4, wherein n−

2 of the plurality of discrete regions are positioned in the transfer region.

12. The chamber of claim 11, wherein the first circular housing comprises a plurality of vacuum seals coupled thereto that are in sliding contact with a contact surface of the second circular housing.

13. The chamber of claim 10, wherein the second circular housing comprises an n number of discrete regions, n being equal to or greater than 4, wherein n−

2 of the plurality of discrete regions are positioned in the transfer region.

14. The chamber of claim 13, wherein the conveyor comprises a plurality of roller elements.

15. The chamber of claim 13, wherein the conveyor comprises a continuous drive member disposed on a roller assembly.

16. The chamber of claim 13, wherein each of the plurality of discrete regions comprises one or more conveyors.

17. The chamber of claim 12, wherein the second circular housing comprises a plurality of vacuum seals coupled thereto that are in sliding contact with the contact surface of the first circular housing.

18. A method for transferring a plurality of substrates, the method comprising:

transferring at least one substrate through a first opening in a first housing to a first region of a second housing that is at a first pressure, the second housing comprising a conveyor that is disposed in the first region;

moving the at least one substrate disposed in the second housing along a circular path to a second region that is maintained at a second pressure lower than the first pressure;

transferring the substrate through a second opening in the first housing to an environment having a pressure equal to or less than the first pressure.

19. The method of claim 18, wherein the moving the substrate comprises rotating the second housing about an axis.

20. The method of claim 19, wherein the axis is aligned in a vertical or a horizontal orientation.

21. The method of claim 18, wherein transferring the substrate through the first opening comprises transferring the substrate having a first side supported by a first conveyor.

22. The method of claim 21, wherein transferring the substrate through the second opening comprises transferring the substrate having a second side supported by a second conveyor.