Thick Film Transducer Arrays
First Claim
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1. A method of fabricating a transducer array, the method comprising:
- creating a lens shaped depression having dimensions of radius of curvature, elevation, and length into a face of a block of backing material;
printing an electrode onto the depression and over an edge along the length of the depression;
printing a thick layer of PZT material into the depression and on the electrode;
printing a ground electrode into the depression and on the thick layer of PZT and over a distal edge along the length of the depression, wherein an electrode length over the edge is less than a ground length over the distal edge;
placing a plurality of equally spaced cuts into the depression and perpendicular to the length, wherein the plurality of equally spaced cuts electrically and mechanically isolate each element of the transducer array.
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Abstract
Various embodiments provide processes of fabrication to form acoustically and electrically isolated elements of a transducer array. For example, a cutting means such as use of a dicing saw, a laser, or etching, can be used on a cylindrically-focused transducer to form acoustically and electrically isolated elements of the transducer array.
92 Citations
10 Claims
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1. A method of fabricating a transducer array, the method comprising:
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creating a lens shaped depression having dimensions of radius of curvature, elevation, and length into a face of a block of backing material; printing an electrode onto the depression and over an edge along the length of the depression; printing a thick layer of PZT material into the depression and on the electrode; printing a ground electrode into the depression and on the thick layer of PZT and over a distal edge along the length of the depression, wherein an electrode length over the edge is less than a ground length over the distal edge; placing a plurality of equally spaced cuts into the depression and perpendicular to the length, wherein the plurality of equally spaced cuts electrically and mechanically isolate each element of the transducer array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification