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DEVICE FOR MEASURING FORCE COMPONENTS, AND METHOD FOR ITS PRODUCTION

  • US 20140083210A1
  • Filed: 09/24/2013
  • Published: 03/27/2014
  • Est. Priority Date: 09/25/2012
  • Status: Active Grant
First Claim
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1. A device for measuring force components formed from a single crystal material wafer, wherein said device comprises:

  • at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, providing a mass of inertia,wherein said mass body has a first and a second major surface which are substantially parallel with a wafer plane, andwherein a mass body cross section presents a portion which is substantially symmetrical along a centrally (in a thickness direction) located plane parallel with said wafer plane.

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