METHOD AND APPARATUS FOR SUBSTRATE EDGE CLEANING
First Claim
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1. A method for cleaning at least one edge of a substrate, the method comprising:
- conveying the substrate edge across a cleaning system comprising;
(a) a plurality of fluid channels disposed within the cleaning system and configured to deliver at least one fluid to the substrate edge;
(b) a plurality of brushes, each connected to at least one of the plurality of fluid channels and comprising a plurality of bristles and/or nodules;
(c) at least one nozzle, connected to at least one of the plurality of fluid channels; and
(d) at least one vibration generator connected to the cleaning system and disposed to deliver sonic energy to at least one of the brushes, andcontacting the substrate edge with the plurality of brushes and at least one fluid for a time sufficient to remove particles from the substrate edge;
wherein the substrate comprises a first surface and a second surface substantially parallel with the first surface;
wherein the substrate edge comprises a first bevel, a second bevel, and an apex between the first and second bevels; and
wherein the plurality of brushes is disposed within the cleaning system so as to contact at least the first bevel, the second bevel, and the apex of the substrate edge.
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Abstract
Disclosed herein are methods and apparatuses for cleaning at least one edge of a substrate. Exemplary methods and apparatuses include a cleaning system comprising (a) a plurality of fluid channels, (b) a plurality of brushes, (c) at least one nozzle, and (d) at least one vibration generator. The brushes may comprise a plurality of bristles and/or nodules and may be connected to at least one of the fluid channels such that fluid flows through the bristles and/or nodules to the substrate edge. At least one vibration generator may be connected to the cleaning system and configured to deliver sonic energy to the plurality of brushes.
11 Citations
17 Claims
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1. A method for cleaning at least one edge of a substrate, the method comprising:
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conveying the substrate edge across a cleaning system comprising; (a) a plurality of fluid channels disposed within the cleaning system and configured to deliver at least one fluid to the substrate edge; (b) a plurality of brushes, each connected to at least one of the plurality of fluid channels and comprising a plurality of bristles and/or nodules; (c) at least one nozzle, connected to at least one of the plurality of fluid channels; and (d) at least one vibration generator connected to the cleaning system and disposed to deliver sonic energy to at least one of the brushes, and contacting the substrate edge with the plurality of brushes and at least one fluid for a time sufficient to remove particles from the substrate edge; wherein the substrate comprises a first surface and a second surface substantially parallel with the first surface; wherein the substrate edge comprises a first bevel, a second bevel, and an apex between the first and second bevels; and wherein the plurality of brushes is disposed within the cleaning system so as to contact at least the first bevel, the second bevel, and the apex of the substrate edge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An apparatus for cleaning at least one edge of a substrate, the apparatus comprising a cleaning system comprising:
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(a) a plurality of fluid channels disposed within the cleaning system and configured to deliver at least one fluid to the substrate edge; (b) a plurality of brushes, each connected to at least one of the plurality of fluid channels and comprising a plurality of bristles and/or nodules; (c) at least one nozzle, connected to at least one of the plurality of fluid channels; and (d) at least one vibration generator connected to at least one of the plurality of brushes and disposed to deliver sonic energy to the brushes; wherein the substrate comprises a first surface and a second surface substantially parallel with the first surface; wherein the substrate edge comprises a first bevel, a second bevel, and an apex between the first and second bevels; and wherein the plurality of brushes is disposed within the cleaning system so as to contact at least the first bevel, the second bevel, and the apex of the substrate edge. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification