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THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME

  • US 20140084283A1
  • Filed: 02/01/2013
  • Published: 03/27/2014
  • Est. Priority Date: 09/24/2012
  • Status: Active Grant
First Claim
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1. A method for manufacturing a thin film transistor, comprising:

  • forming a gate electrode on a substrate;

    forming an active layer that is adjacent to the gate electrode and comprises an oxide semiconductor;

    forming an oxygen providing layer on the active layer;

    forming a gate dielectric between the gate electrode and the active layer;

    forming source and drain electrodes coupled to the active layer;

    forming a planarizing layer covering the gate electrode and the gate dielectric;

    forming a hole exposing the active layer; and

    performing a heat treatment process onto the planarizing layer in an atmosphere of oxygen.

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