Cleanroom
First Claim
1. A cleanroom for storing glass substrates, comprisingan exhaust disposed on a bottom floor of the cleanroom;
- a first filtering device arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom;
a second filtering device arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom;
wherein the first filtering device includes,a preliminary filter used to purify incoming airflow;
an intake having one end interconnected to the preliminary filter;
a housing with another end of the intake interconnected thereto;
an electrical motor disposed within the housing;
a fan coupled to the electrical motor;
an airflow regulator arranged under the fan to balance the airflow;
a filter disposed under the airflow regulator for filtering the airflow a second time;
a metallic protective screen is disposed on a bottom of the housing;
at least a mounting leg disposed under the bottom to fixedly attach to the ceiling and the bottom floor; and
a controlling unit is used to operate the electrical motor.
1 Assignment
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Accused Products
Abstract
The present invention provides a cleanroom for storing glass substrates, and which comprises an exhaust is disposed on a bottom floor of the cleanroom. A first filtering device is arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom. A second filtering device is arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom. The present invention can readily resolve the prior art issue in which the airborne particles stirred by turbulence within the cleanroom cannot be effectively eliminated.
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Citations
13 Claims
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1. A cleanroom for storing glass substrates, comprising
an exhaust disposed on a bottom floor of the cleanroom; -
a first filtering device arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom; a second filtering device arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom; wherein the first filtering device includes, a preliminary filter used to purify incoming airflow; an intake having one end interconnected to the preliminary filter; a housing with another end of the intake interconnected thereto; an electrical motor disposed within the housing; a fan coupled to the electrical motor; an airflow regulator arranged under the fan to balance the airflow; a filter disposed under the airflow regulator for filtering the airflow a second time; a metallic protective screen is disposed on a bottom of the housing; at least a mounting leg disposed under the bottom to fixedly attach to the ceiling and the bottom floor; and a controlling unit is used to operate the electrical motor.
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2. A cleanroom for storing glass substrates, comprising
an exhaust disposed on a bottom floor of the cleanroom; -
a first filtering device arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom; and a second filtering device arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification