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Cleanroom

  • US 20140087650A1
  • Filed: 10/09/2012
  • Published: 03/27/2014
  • Est. Priority Date: 09/26/2012
  • Status: Active Grant
First Claim
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1. A cleanroom for storing glass substrates, comprisingan exhaust disposed on a bottom floor of the cleanroom;

  • a first filtering device arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom;

    a second filtering device arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom;

    wherein the first filtering device includes,a preliminary filter used to purify incoming airflow;

    an intake having one end interconnected to the preliminary filter;

    a housing with another end of the intake interconnected thereto;

    an electrical motor disposed within the housing;

    a fan coupled to the electrical motor;

    an airflow regulator arranged under the fan to balance the airflow;

    a filter disposed under the airflow regulator for filtering the airflow a second time;

    a metallic protective screen is disposed on a bottom of the housing;

    at least a mounting leg disposed under the bottom to fixedly attach to the ceiling and the bottom floor; and

    a controlling unit is used to operate the electrical motor.

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