APPARATUS AND METHOD FOR WEB-BASED TOOL MANAGEMENT

• US 20140088749A1
• Filed: 11/26/2013
• Published: 03/27/2014
• Est. Priority Date: 02/01/2000
• Status: Active Grant

• Current Assignee: PEER Intellectual Property Incorporated
• Original Assignee: PEER Intellectual Property Incorporated
• Inventors: Ellis, Raymond W., Baylis, Charles M., Pendleton, Mark T.
• Granted Patent: US 9,841,752 B2
• Time in Patent Office: Days
• US Class Current: 700/117
• CPC Class Codes: G05B 19/042 using digital processors G05B19/05 takes precedence
• CPC Class Codes: G05B 19/418 Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
• CPC Class Codes: G05B 19/41855 by local area network [LAN], network structure
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: H04L 63/083 using passwords cryptographic mechanisms or cryptographic arrangements for entity authentication using a predetermined code H04L9/3226
• CPC Class Codes: H04L 67/02 based on web technology, e.g. hypertext transfer protocol [HTTP]
• CPC Class Codes: H04L 67/12 specially adapted for proprietary or special-purpose networking environments, e.g. medical networks, sensor networks, networks in vehicles or remote metering networks
• CPC Class Codes: H04L 69/18 Multiprotocol handlers, e.g. single devices capable of handling multiple protocols
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method for controlling an automated manufacturing tool for semiconductor fabrication is provided, including the following method operations: receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool; authenticating the request; and, in response to receiving the request, triggering performance of the action by the automated manufacturing tool.

Claims

1. A method for controlling an automated manufacturing tool for semiconductor fabrication, comprising:

receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool;

authenticating the request;

in response to receiving the request, triggering performance of the action by the automated manufacturing tool.

2. The method of claim 1, wherein triggering performance of the action includes invoking a method, identified by the request, to initiate processing on the automated manufacturing tool.

3. The method of claim 1, further comprising:

after the performance of the action, receiving a report from the automated manufacturing tool.

4. The method of claim 1, wherein authenticating the request includes determining whether the request is from an authorized user.

5. The method of claim 4, wherein determining whether the request is from an authorized user includes determining whether the request includes data defining a user name, and if so, then extracting the user name and comparing the extracted user name with a list of authorized users.

6. The method of claim 5, wherein when the request does not include data defining a user name, then providing a login page configured to receive a user name and password.

7. The method of claim 1, wherein the performance of the action by the automated manufacturing tool defines an operation for the processing of one or more semiconductor wafers.

8. A method for providing information about an automated manufacturing tool for semiconductor fabrication, comprising:

receiving, over a network, a request from a client for information about an automated manufacturing tool;

authenticating the request;

in response to receiving the request, retrieving the information about the automated manufacturing tool, and sending the information to the client.

9. The method of claim 8, wherein the request identifies an object of a tool object model associated with the automated manufacturing tool, the tool object model providing a logical description of the automated manufacturing tool.

10. The method of claim 8, wherein authenticating the request includes determining whether the request is from an authorized user.

11. The method of claim 10, wherein determining whether the request is from an authorized user includes determining whether the request includes data defining a user name, and if so, then extracting the user name and comparing the extracted user name with a list of authorized users.

12. The method of claim 11, wherein when the request does not include data defining a user name, then providing a login page configured to receive a user name and password.

13. The method of claim 8, wherein the information about the automated manufacturing tool includes data characterizing an operation for the processing of one or more semiconductor wafers.