Three-Axis Nano-Resonator Accelerometer Device and Method
First Claim
1. A method for measuring acceleration on three orthogonal axes comprising the steps of:
- providing a first, a second and a third inertial sensor on a planar substrate,orienting the first inertial sensor to measure a first acceleration on a first axis parallel to the substrate,orienting the second inertial sensor to measure a second acceleration on a second axis perpendicular to the first axis and parallel to the substrate,orienting the third inertial sensor to measure a third acceleration on a third axis perpendicular to the substrate,wherein at least one of the inertial sensors comprises a proof mass coupled to a plurality of nano-resonators that are longitudinally disposed parallel to a direction of deflection of the proof mass resulting from the first, second or third accelerations,the nano-resonators comprising a sense means and a drive means disposed on a first thickness of the nano-resonators,the nano-resonators configured to be capable of being oscillated at a first predetermined frequency and configured to oscillate at a second frequency in response to a resultant force produced by the first, second or third accelerations of the proof mass.
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Abstract
An inertial measurement device and method for measuring acceleration in three axes. Three orthogonally disposed accelerometers are defined on a common planar substrate. At least one of the accelerometers is provided with a proof mass coupled to a nano-resonator element. The nano-resonator element is oscillated at a first predetermined frequency, which may be a first resonant frequency, and is altered to oscillate at a second frequency, which may be a second resonant frequency, in response to a resultant force produced by the acceleration of the proof mass. The degree of change in nano-resonator element output frequency is sensed and processed using suitable processing circuitry as a change in acceleration on the active axis.
21 Citations
5 Claims
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1. A method for measuring acceleration on three orthogonal axes comprising the steps of:
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providing a first, a second and a third inertial sensor on a planar substrate, orienting the first inertial sensor to measure a first acceleration on a first axis parallel to the substrate, orienting the second inertial sensor to measure a second acceleration on a second axis perpendicular to the first axis and parallel to the substrate, orienting the third inertial sensor to measure a third acceleration on a third axis perpendicular to the substrate, wherein at least one of the inertial sensors comprises a proof mass coupled to a plurality of nano-resonators that are longitudinally disposed parallel to a direction of deflection of the proof mass resulting from the first, second or third accelerations, the nano-resonators comprising a sense means and a drive means disposed on a first thickness of the nano-resonators, the nano-resonators configured to be capable of being oscillated at a first predetermined frequency and configured to oscillate at a second frequency in response to a resultant force produced by the first, second or third accelerations of the proof mass. - View Dependent Claims (2)
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3. A three-axis accelerometer structure comprising:
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a planar substrate, a first accelerometer device supported by the planar substrate and configured to measure a first acceleration on a first axis extending in a plane of the substrate, a second accelerometer device supported by the planar substrate and configured to measure a second acceleration on a second axis extending in the plane of the substrate and perpendicular to the first axis, a third accelerometer device supported by the planar substrate and configured to measure a third acceleration on a third axis that is perpendicular to the plane of the substrate, wherein at least one of the accelerometer devices comprises a proof mass coupled to a plurality of nano-resonators that are longitudinally disposed parallel to a direction of deflection of the proof mass resulting from the first, second or third accelerations, the nano-resonators comprising a sense means and a drive means disposed on a first thickness of the nano-resonators, and, the nano-resonators configured to be oscillated at a first predetermined frequency and configured to be altered to oscillate at a second frequency in response to a resultant force produced by the first, second or third accelerations of the proof mass. - View Dependent Claims (4)
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5. A method for measuring acceleration on three orthogonal axes comprising the steps of:
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providing a first, a second and a third inertial sensor on a planar substrate, orienting the first inertial sensor to measure a first acceleration on a first axis parallel to the substrate, orienting the second inertial sensor to measure a second acceleration on a second axis perpendicular to the first axis and parallel to the substrate, orienting the third inertial sensor to measure a third acceleration on a third axis perpendicular to the substrate, wherein at least one of the inertial sensors comprises a proof mass coupled to a plurality of nano-resonators that are longitudinally disposed parallel to a direction of deflection of the proof mass resulting from an acceleration, the nano-resonators comprising a sense means and a drive means disposed on a first thickness of the nano-resonators, the nano-resonators configured to be capable of being oscillated at a first predetermined frequency and configured to oscillate at a second frequency in response to a resultant force produced by the acceleration of the proof mass.
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Specification