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SYSTEMS AND METHODS FOR MONITORING SENSORS

  • US 20140091811A1
  • Filed: 09/28/2012
  • Published: 04/03/2014
  • Est. Priority Date: 09/28/2012
  • Status: Active Grant
First Claim
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1. A method for multivariable measurements using a single-chip impedance analyzer, the method comprisingproviding a sensor;

  • exposing the sensor to an environmental parameter;

    determining a complex impedance of the sensor over a measured spectral frequency range of the sensor; and

    monitoring at least three spectral parameters of the sensor.

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