×

ELECTROMECHANICAL SYSTEMS DEVICE WITH PROTRUSIONS TO PROVIDE ADDITIONAL STABLE STATES

  • US 20140092110A1
  • Filed: 10/01/2012
  • Published: 04/03/2014
  • Est. Priority Date: 10/01/2012
  • Status: Active Grant
First Claim
Patent Images

1. An electromechanical systems (EMS) device, comprising:

  • a substrate;

    a stationary electrode over the substrate;

    a movable electrode over the stationary electrode and configured to move to three or more positions across a gap by electrostatic actuation between the movable electrode and the stationary electrode; and

    a protrusion connected to a surface of the EMS device, wherein the protrusion is configured to change the stiffness of the EMS device when in contact with another surface of the EMS device at one of the positions across the gap, and wherein at least one of the surfaces in contact with the protrusion is non-rigid.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×