METHOD FOR AVOIDING ARTEFACTS DURING SERIAL BLOCK FACE IMAGING
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Abstract
A method includes capturing a first image of the sample via a detector, wherein the particles of the primary particle beam have a first average energy so that the interaction products detected by the detector predominantly contain sample information from a sample layer lying below the sample surface. The method also includes removing the outermost sample layer with the aid of the cutting device, and capturing a second image of the sample via the detector, wherein the particles of the primary particle beam have a second average energy so that the interaction products detected by the detector predominantly contain sample information from the surface layer of the sample. The method further includes calculating the lateral shift/lateral offset of the sample from a comparison of the first and second images, and compensating for the lateral offset.
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Citations
36 Claims
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1-16. -16. (canceled)
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17. A method, comprising:
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a) obtaining a first image of a sample based on detected interaction products of a primary particle beam and the sample, the particles of the primary particle beam having a first average energy so that the detected interaction products predominantly contain sample information for a layer of the sample lying below a surface of the sample; b) after a), removing the surface layer of the sample via a cutting device to provide a new surface of the sample; c) after b), exposing the sample to a second primary particle beam generated by the particle source; d) after c), obtaining a second image of the sample based on detected interaction products of a second primary particle beam and the sample, the particles of the second primary particle beam having a second average energy so that the detected interaction products predominantly contain sample information from the new surface of the sample; and e) after d), calculating a lateral shift of the sample based on a comparison of the first and second images. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification