SEMICONDUCTOR STRUCTURE AND METHOD OF GENERATING MASKS FOR MAKING INTEGRATED CIRCUIT
First Claim
16. A method of simulating coupling capacitance variation of a plurality of conductive paths of the integrated circuit caused by misalignment of masks for making the plurality of conductive paths, the plurality of conductive paths is arranged in parallel, and the method comprising:
- generating a table listing combinations of one or more predetermined conductive paths of the plurality of conductive paths and types of misalignment between a corresponding one of the masks against the remaining of the masks;
identifying a subset of combinations that do not correspond to shifting a corresponding conductive path of the plurality of conductive paths between two adjacent conductive paths of the plurality of conductive paths; and
calculating, by a hardware processor, a coupling capacitance value based on one combination of the subset of combinations.
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Abstract
A method of generating masks for making an integrated circuit includes determining if a coupling capacitance value of a conductive path of a first and second groups of conductive paths of the integrated circuit is greater than a predetermined threshold value. The determination is performed based on at least a resistance-capacitance extraction result of the conductive path and a predetermined level of mask misalignment. The layout patterns are modified to increase an overall vertical distance between the first group of conductive paths and the second group of conductive paths if the coupling capacitance value is greater than the predetermined threshold value.
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Citations
31 Claims
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16. A method of simulating coupling capacitance variation of a plurality of conductive paths of the integrated circuit caused by misalignment of masks for making the plurality of conductive paths, the plurality of conductive paths is arranged in parallel, and the method comprising:
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generating a table listing combinations of one or more predetermined conductive paths of the plurality of conductive paths and types of misalignment between a corresponding one of the masks against the remaining of the masks; identifying a subset of combinations that do not correspond to shifting a corresponding conductive path of the plurality of conductive paths between two adjacent conductive paths of the plurality of conductive paths; and calculating, by a hardware processor, a coupling capacitance value based on one combination of the subset of combinations. - View Dependent Claims (17, 18, 19)
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20. A semiconductor structure comprising:
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a first conductive path and a second conductive path configured to carry a first pair of differential signals representative of an in-phase signal; a third conductive path and a fourth conductive path configured to carry a second pair of differential signals representative of a quadrature signal corresponding to the in-phase signal, wherein the first, second, third, and fourth conductive paths extend along a first direction and are arranged according to an order, along a second direction perpendicular to the first direction, of the first, third, second, and fourth conductive paths, the first and second conductive paths are separated from the third and fourth conductive paths by an overall vertical distance. - View Dependent Claims (1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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28-1. The semiconductor structure of claim 24, further comprising:
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a first conductive dummy path and a second conductive dummy path in one of the two conductive layers and extending along the first direction, the first, second, third, and fourth conductive paths being horizontally between the first dummy conductive path and the second dummy conductive path; and a third dummy conductive path and a fourth dummy conductive path in the other one of the two conductive layers and extending along the first direction, the first, second, third, and fourth conductive paths being horizontally between the third dummy conductive path and the fourth dummy conductive path.
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30. A method of generating layout patterns for making a first and second conductive paths of an integrated circuit, the first and second conductive paths being in parallel along a predetermined direction, the method comprising:
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dividing a first line pattern representative of the first conductive path into a first set of segments; dividing a second line pattern representative of the second conductive path into a second set of segments; grouping the first set of segments and the second set of segments into; a first group of segments containing odd-ordered segments of the first set of segments and even-ordered segments of the second set of segments; and a second group of segments containing even-ordered segments of the first set of segments and odd-ordered segments of the second set of segments; assigning layout patterns of the odd-ordered segments in the first group of segments to a first mask; assigning layout patterns of the even-ordered segments in the first group of segments to a second mask; assigning layout patterns of odd-ordered segments in the second group of segments to a third mask; and assigning layout patterns of even-ordered segments in the first group of segments to a fourth mask. - View Dependent Claims (31)
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Specification