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SEMICONDUCTOR STRUCTURE AND METHOD OF GENERATING MASKS FOR MAKING INTEGRATED CIRCUIT

  • US 20140103545A1
  • Filed: 10/12/2012
  • Published: 04/17/2014
  • Est. Priority Date: 10/12/2012
  • Status: Active Grant
First Claim
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16. A method of simulating coupling capacitance variation of a plurality of conductive paths of the integrated circuit caused by misalignment of masks for making the plurality of conductive paths, the plurality of conductive paths is arranged in parallel, and the method comprising:

  • generating a table listing combinations of one or more predetermined conductive paths of the plurality of conductive paths and types of misalignment between a corresponding one of the masks against the remaining of the masks;

    identifying a subset of combinations that do not correspond to shifting a corresponding conductive path of the plurality of conductive paths between two adjacent conductive paths of the plurality of conductive paths; and

    calculating, by a hardware processor, a coupling capacitance value based on one combination of the subset of combinations.

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