DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
First Claim
1. A dielectric layer for an electrostatic chuck comprising a ceramic material that includes an aluminum oxide, wherein in a first phase of the aluminum oxide, a second phase is dispersed;
- the second phase comprises composite carbonitride of Ti and an Me expressed by (Ti, Me)(C, N);
wherein the Me comprises one or more of transition elements of Group 3 to Group 11 of the periodic table.
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Accused Products
Abstract
A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (Ω·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
7 Citations
12 Claims
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1. A dielectric layer for an electrostatic chuck comprising a ceramic material that includes an aluminum oxide, wherein in a first phase of the aluminum oxide, a second phase is dispersed;
- the second phase comprises composite carbonitride of Ti and an Me expressed by (Ti, Me)(C, N);
wherein the Me comprises one or more of transition elements of Group 3 to Group 11 of the periodic table. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
- the second phase comprises composite carbonitride of Ti and an Me expressed by (Ti, Me)(C, N);
Specification