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DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK

  • US 20140103612A1
  • Filed: 10/15/2013
  • Published: 04/17/2014
  • Est. Priority Date: 10/15/2012
  • Status: Active Grant
First Claim
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1. A dielectric layer for an electrostatic chuck comprising a ceramic material that includes an aluminum oxide, wherein in a first phase of the aluminum oxide, a second phase is dispersed;

  • the second phase comprises composite carbonitride of Ti and an Me expressed by (Ti, Me)(C, N);

    wherein the Me comprises one or more of transition elements of Group 3 to Group 11 of the periodic table.

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