Configurable Charged-Particle Apparatus
First Claim
1. A configurable charged-particle apparatus equipped with:
- a charged particle column comprising;
a charged particle source for producing a beam of charged particles along an optical axis; and
a magnetic immersion lens for focusing the beam of charged particles on a sample position, the magnetic immersion lens comprising a first lens pole, said first lens pole forming the part of the magnetic immersion lens farthest from the charged particle source;
an excitation coil surrounding the first lens pole;
at least a first stage on which a sample can be mounted, the first stage movable with respect to the optical axis; and
one or more detectors for detecting radiation emanating from the sample in response to the beam of charged particles stimulating the sample;
the immersion lens having a configurable magnetic circuit;
wherein;
the apparatus has at least a first configuration and a second configuration, the apparatus in the first configuration equipped to position the sample with respect to the optical axis while the sample is mounted on the first stage, the apparatus in the second configuration having a second lens pole mounted on the first stage, the second lens pole intersecting the optical axis, and the apparatus in the second configuration equipped with a second stage for mounting the sample thereon, the second stage equipped to position the sample between the first lens pole and the second lens pole, the second stage movable with respect to the optical axis,as a result of which the optical properties of the magnetic immersion lens differs in the first and the second configuration, and can in the second configuration be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.
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Accused Products
Abstract
The invention relates to a charged-particle apparatus having
- a charged particle source with an optical axis;
- a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and
- a first sample stage movable with respect to the optical axis.
The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.
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Citations
20 Claims
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1. A configurable charged-particle apparatus equipped with:
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a charged particle column comprising; a charged particle source for producing a beam of charged particles along an optical axis; and a magnetic immersion lens for focusing the beam of charged particles on a sample position, the magnetic immersion lens comprising a first lens pole, said first lens pole forming the part of the magnetic immersion lens farthest from the charged particle source; an excitation coil surrounding the first lens pole; at least a first stage on which a sample can be mounted, the first stage movable with respect to the optical axis; and one or more detectors for detecting radiation emanating from the sample in response to the beam of charged particles stimulating the sample; the immersion lens having a configurable magnetic circuit;
wherein;the apparatus has at least a first configuration and a second configuration, the apparatus in the first configuration equipped to position the sample with respect to the optical axis while the sample is mounted on the first stage, the apparatus in the second configuration having a second lens pole mounted on the first stage, the second lens pole intersecting the optical axis, and the apparatus in the second configuration equipped with a second stage for mounting the sample thereon, the second stage equipped to position the sample between the first lens pole and the second lens pole, the second stage movable with respect to the optical axis, as a result of which the optical properties of the magnetic immersion lens differs in the first and the second configuration, and can in the second configuration be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
wherein; before loading the sample into the apparatus onto the first stage, bringing the apparatus in the first configuration; after attaching the lamella to the manipulator removing the sample from the first stage and bringing the apparatus in the second configuration, positioning the lamella for imaging with the electron column involves positioning the lamella between the first and the second lens pole.
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14. The method of claim 13 in which the lamella is attached to the second stage and detached from the manipulator before imaging.
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15. The method of claim 13 in which the loading involves loading with an automated loader a sample from a cassette with samples.
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16. The method of claim 13 in which the distance between the first lens pole and the second lens pole is varied in several sub-configurations of the second configuration, the change in sub-configurations realized by a movement of the first stage along the optical axis.
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17. The method of claim 13 in which the apparatus is equipped with a controller programmed to change the lens configuration from the first configuration to the second configuration.
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18. The method of claim 13 in which in the first configuration the second lens pole is mounted on a part of the first stage that is removed from the optical axis, so that the second lens pole does not form part of the magnetic circuit of the magnetic immersion lens.
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19. The method of claim 13 in which in the first configuration the second lens pole is parked in a stationary position in the sample chamber, the stationary position removed from the optical axis as a result of the which the second lens pole, when parked in the stationary position, does not form part of the magnetic circuit of the magnetic immersion lens.
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20. The method of claim 13 in which the second lens pole has a central bore;
- and in the second configuration, imaging the lamella comprises detecting electrons that passed through the sample by a detector positioned below the bore, the bore for passing electrons that passed through the sample.
Specification