Single channel scanning acoustic microscope with multiple focused ultrasonic transducers

• US 20140116143A1
• Filed: 10/28/2013
• Published: 05/01/2014
• Est. Priority Date: 10/26/2012
• Status: Active Grant

• Current Assignee: Nordson Corporation
• Original Assignee: Sonoscan Inc. (Nordson Corporation)
• Inventors: Kessler, Lawrence W., Komsky, Igor N.
• Granted Patent: US 10,228,354 B2
• Time in Patent Office: Days
• US Class Current: 73/618
• CPC Class Codes: G01N 29/0681 by acoustic microscopy, e.g. scanning acoustic microscopy
• CPC Class Codes: G01N 29/262 by electronic orientation or focusing, e.g. with phased arrays phased arrays per se G10K11/34
• CPC Class Codes: G01N 29/28 providing acoustic coupling , e.g. water impedance matching G10K11/02
• CPC Class Codes: G01N 29/34 Generating the ultrasonic, sonic or infrasonic waves , e.g. electronic circuits specially adapted therefor
• CPC Class Codes: G01N 29/341 with time characteristics
• CPC Class Codes: G01N 29/343 pulse waves, e.g. particular sequence of pulses, bursts

Abstract

A single channel scanning acoustic microscope that increases the throughput of the acoustic imaging system by connecting a multi-transducer assembly in parallel to a single channel electronic circuit. The single channel scanning acoustic microscope includes multiple transducers configured to generate a time delay for individual ultrasonic waves generated by each transducer, wherein a pulse generator simultaneously sends a pulse signal to the multi-transducer assembly.

Claims

1. A scanning acoustic microscope, comprising:

a single channel electronic circuit configuration comprising a pulse generator, an amplifier, a digital format converter and a visual display;

a plurality of transducers, wherein each transducer comprises an acoustic rod body, at least a piezoelectric and at least a lens, wherein each transducer generates an individual ultrasonic wave;

wherein said plurality of transducers is configured to generate a proper time delay for said individual ultrasonic wave;

wherein each transducer of said plurality of transducers is connected to said single channel electronic circuit configuration; and

wherein said plurality of transducers is electrically coupled to the pulse generator for simultaneously receiving a pulse signal.

2. The scanning acoustic microscope of claim 1, comprising:

a part under inspection;

a fluid, wherein said fluid at least covers the distance between said plurality of transducers and said part under inspection;

wherein the fluid located between each transducer and said part under inspection generates an individual fluid path for each transducer; and

wherein said individual fluid path for each transducer generates an acoustic signal delay for each individual ultrasonic wave.

3. The scanning acoustic microscope of claim 2, wherein said acoustic signal delay comprises different lengths for each individual fluid path.

4. The scanning acoustic microscope of claim 3, wherein at least more than one transducer from the plurality of transducers are arranged to provide said individual ultrasonic wave to a similar focal depth at a similar portion of the part under inspection.

5. The scanning acoustic microscope of claim 3, wherein each transducer is configured to generate an individual ultrasonic wave that travels onto the part under inspection.

6. The scanning acoustic microscope of claim 3, wherein each transducer is configured to generate a focal depth inside the part under inspection, wherein the focal depth for each transducer is the same.

7. The scanning acoustic microscope of claim 3, wherein each transducer is configured to generate an individual ultrasonic wave that travels the same distance inside the part under inspection.

8. The scanning acoustic microscope of claim 1, comprising:

a part under inspection;

a fluid, wherein said fluid at least covers the distance between said plurality of transducers and said part under inspection;

wherein the fluid located between said plurality of transducers and said part under inspection generates an individual fluid path; and

wherein said acoustic rod body comprises a rod length, wherein the rod length for each transducer generates an acoustic signal delay for the individual ultrasonic wave.

9. The scanning acoustic microscope of claim 8, wherein the rod length for each transducer is different.

10. The scanning acoustic microscope of claim 8, wherein each individual ultrasonic wave is configured to travel onto the part under inspection.

11. The scanning acoustic microscope of claim 8, wherein each individual ultrasonic wave is configured to travel the same distance inside the part under inspection.

12. The scanning acoustic microscope of claim 1, wherein said piezoelectric is a piezoelectric crystal directly attached to a first distal end of the acoustic rod body and said lens is connected to a second distal end of the acoustic rod body.

13. A scanning acoustic microscope, comprising:

a plurality of transducers wherein at least more than one transducer simultaneously emits a focused ultrasonic beam towards a part under inspection;

wherein each transducer comprises an acoustic rod, wherein a first end of each transducer is connected to a single channel electronic circuit;

at least one lens connected to a second end of each transducer of said plurality of transducers;

a piezoelectric crystal directly attached to the acoustic rod of each transducer of said plurality of transducers; and

wherein a reflection of said ultrasonic beam that travels into the part under inspection from each transducer is received by said at least more than one transducer with a time delay and transmitted to the single channel electronic circuit.

14. The scanning acoustic microscope of claim 13, wherein the time delay is introduced by using an acoustic signal delay.

15. The scanning acoustic microscope of claim 14, wherein a first group of transducers selected from the plurality of transducers is positioned at different distances from a top side of the part under inspection.

16. The scanning acoustic microscope of claim 14, wherein a second group of transducers selected from the plurality of transducers can be positioned at different distances from a bottom side of the part under inspection.

17. The scanning acoustic microscope of claim 13, wherein the acoustic rods have different lengths.

18. The scanning acoustic microscope of claim 13, wherein said at least more than one transducer from the plurality of transducers, in combination with a water path delay, are positioned on the top side of the part under inspection and the bottom side of the part under inspection.

19. The scanning acoustic microscope of claim 13, wherein the time delay is introduced by using an electronic signal delay.

20. The scanning acoustic microscope of claim 13, wherein at least more than one transducer from the plurality of transducers, in combination with an acoustic rod delay, are positioned on the top side of the part under inspection and the bottom side of the part under inspection.

21. The scanning acoustic microscope of claim 13, wherein at least two transducers are positioned around the part under inspection to show the concurrent imaging of said part under inspection.

22. The scanning acoustic microscope of claim 21 comprising:

a plurality of water path time delays for the concurrent imaging of the part under inspection wherein the time delays are provided by spacing each transducer at different axial distances away from the part to be inspected.

23. The scanning acoustic microscope of claim 21 comprising:

a plurality of acoustic rod time delays for the concurrent imaging of the part under inspection wherein the time delays are provided by the different length of the acoustic rods.