ARRAY SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME AND DISPLAY DEVICE
First Claim
1. An array substrate, comprising a substrate and a thin film transistor and a pixel electrode which are formed on the substrate, the thin film transistor comprising a gate electrode, a gate insulating layer, an active layer, and source and drain electrodes, and being overlaid with a multilayered passivation layer;
- wherein the active layer of the thin film transistor is of an oxide semiconductor; and
the multilayered passivation layer comprises at least one layer of inorganic insulating thin film or organic insulating thin film.
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Abstract
The present invention relate to a display device, an array substrate and a method for manufacturing the same. The array substrate includes a substrate and a thin film transistor and a pixel electrode which are formed on the substrate, the thin film transistor includes a gate electrode, a gate insulating layer, an active layer, and source and drain electrodes and is overlaid with a passivation layer, the active layer of the thin film transistor is of an oxide semiconductor, and the passivation layer comprises at least one layer of inorganic insulating thin film or organic insulating thin film. With this array substrate, the oxide semiconductor can be effectively avoided from being affected by hydrogen-containing groups, so that stability of the whole TFT device is enhanced to a great extent, and yield of final products is increased.
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Citations
15 Claims
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1. An array substrate, comprising a substrate and a thin film transistor and a pixel electrode which are formed on the substrate, the thin film transistor comprising a gate electrode, a gate insulating layer, an active layer, and source and drain electrodes, and being overlaid with a multilayered passivation layer;
- wherein the active layer of the thin film transistor is of an oxide semiconductor; and
the multilayered passivation layer comprises at least one layer of inorganic insulating thin film or organic insulating thin film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
- wherein the active layer of the thin film transistor is of an oxide semiconductor; and
Specification