RF Pulse Edge Shaping
First Claim
1. A radio frequency (RF) generation module, comprising:
- a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state;
a frequency control module that receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints; and
a pulse shaping module that receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and that transitions an output signal from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.
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Abstract
A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.
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Citations
18 Claims
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1. A radio frequency (RF) generation module, comprising:
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a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state; a frequency control module that receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints; and a pulse shaping module that receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and that transitions an output signal from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for operating a radio frequency (RF) generation module, the method comprising:
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receiving first and second desired amplitudes of an output of the RF generation module in first and second respective states; outputting, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state; outputting frequency setpoints corresponding to the input power setpoints; receiving the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state; and transitioning the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification