Method of protecting sidewall surfaces of a semiconductor device
First Claim
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1. A method of making a semiconductor structure, comprising:
- forming a opening partially through a semiconductor substrate, said opening including an upper portion and a lower portion;
forming a first dielectric layer over a sidewall surface of said upper portion, wherein said first dielectric layer not does not overlie a sidewall surface of said lower portion; and
forming a conductive material over a sidewall surface of said first dielectric layer, said conductive material not being in direct contact with a sidewall surface of said lower portion.
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Abstract
One or more embodiments relate to a method of making a semiconductor structure, comprising: forming a opening partially through a semiconductor substrate, the opening including an upper portion and a lower portion; forming a first dielectric layer over a sidewall surface of the upper portion, wherein the first dielectric layer does not overlie a sidewall surface of the lower portion; and forming a conductive material over a sidewall surface of the first dielectric layer, the conductive material not being in direct contact with a sidewall surface of the lower portion.
6 Citations
19 Claims
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1. A method of making a semiconductor structure, comprising:
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forming a opening partially through a semiconductor substrate, said opening including an upper portion and a lower portion; forming a first dielectric layer over a sidewall surface of said upper portion, wherein said first dielectric layer not does not overlie a sidewall surface of said lower portion; and forming a conductive material over a sidewall surface of said first dielectric layer, said conductive material not being in direct contact with a sidewall surface of said lower portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification