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PROBE CARD AND METHOD OF MANUFACTURING THE SAME

  • US 20140125372A1
  • Filed: 10/28/2013
  • Published: 05/08/2014
  • Est. Priority Date: 11/05/2012
  • Status: Active Grant
First Claim
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1. A probe card, comprising:

  • a wiring substrate including an opening portion and a connection pad arranged on an upper face of the wiring substrate located on a periphery of the opening portion;

    a resin portion formed in the opening portion of the wiring substrate, and the resin portion formed of a material having elasticity;

    a contact terminal arranged to protrude from a lower face of the resin portion; and

    a wire buried in the resin portion and connecting the contact terminal and the connection pad,wherein the contact terminal is formed of an end part of the wire, and is formed integrally with the wire.

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