AMORPHOUS CARBON AND ALUMINUM MEMBRANE
First Claim
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1. A micro electro mechanical system comprising:
- a. a membrane separated from a conducting layer by electrically insulative separators, forming a hollow center that is hermetically separated from gas surrounding the system;
b. the membrane comprising a stack of thin film layers including an aluminum layer, a polymer layer, and an amorphous carbon layer.
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Abstract
A membrane including at least one aluminum layer and at least one amorphous carbon layer. At least one polymer layer may also be included. Aluminum layer(s) can provide improved gas impermeability to the membrane. Amorphous carbon layer(s) can provide corrosion resistance. Polymer layer(s) can provide improved structural strength.
18 Citations
20 Claims
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1. A micro electro mechanical system comprising:
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a. a membrane separated from a conducting layer by electrically insulative separators, forming a hollow center that is hermetically separated from gas surrounding the system; b. the membrane comprising a stack of thin film layers including an aluminum layer, a polymer layer, and an amorphous carbon layer. - View Dependent Claims (2)
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- 3. A membrane device comprising a stack of thin film layers including an aluminum layer, a polymer layer, and an amorphous carbon layer.
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20. A membrane device comprising:
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a. an aluminum layer disposed between a first amorphous carbon layer and a second amorphous carbon layer; b. the first amorphous carbon layer has a thickness of between 1 to 25 nanometers; c. the aluminum layer has a thickness of between 10 to 60 nanometers; and d. the second amorphous carbon layer has a thickness of between 1 to 25 nanometers.
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Specification