DRIVING DEVICE OF DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE DRIVING DEVICE
First Claim
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1. A driving device of a display apparatus, the driving device comprising:
- an active device formed in a first region of a substrate;
a micro optical switch device formed in a second region of the substrate; and
a capacitor formed on the substrate between the active device and the micro optical switch device,wherein the active device comprises;
a gate electrode formed in the first region of the substrate;
an insulating layer formed on the gate electrode;
an active region formed on the insulating layer above the gate electrode; and
a source region and a drain region respectively formed at either side of the active region, andwherein the micro optical switch device comprises;
a first electrode formed on the insulating layer in the second region of the substrate; and
a second electrode formed above and spaced apart from the first electrode.
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Abstract
A driving device of a display apparatus, and a method of manufacturing the driving device. The driving device may have a specific structure, and be manufactured in such a manner, because a first electrode of a micro optical switch device may be formed simultaneously with the formation of at least a source region and a drain region, or a gate electrode of an active device and a capacitor electrode.
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Citations
19 Claims
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1. A driving device of a display apparatus, the driving device comprising:
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an active device formed in a first region of a substrate; a micro optical switch device formed in a second region of the substrate; and a capacitor formed on the substrate between the active device and the micro optical switch device, wherein the active device comprises; a gate electrode formed in the first region of the substrate; an insulating layer formed on the gate electrode; an active region formed on the insulating layer above the gate electrode; and a source region and a drain region respectively formed at either side of the active region, and wherein the micro optical switch device comprises; a first electrode formed on the insulating layer in the second region of the substrate; and a second electrode formed above and spaced apart from the first electrode. - View Dependent Claims (2, 3, 4)
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5. A driving device of a display apparatus, the driving device comprising:
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an active device formed in a first region of a substrate; a micro optical switch device formed in a second region of the substrate; and a capacitor formed on the substrate between the active device and the micro optical switch device, wherein the active device comprises; a gate electrode formed in the first region of the substrate; an insulating layer formed on the gate electrode; an active region formed on the insulating layer above the gate electrode; and a source region and a drain region respectively formed at either side of the active region, and wherein the micro optical switch device comprises; a first electrode formed in the second region on the substrate; and a second electrode formed above and spaced apart from the first electrode. - View Dependent Claims (6, 7, 8)
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9. A method of manufacturing a driving device of a display apparatus, the method comprising:
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forming a gate electrode of an active device and a capacitor electrode on a substrate; forming an active region on an insulating layer above the gate electrode; and forming a source region and a drain region of the active device, and a first electrode of a micro optical switch device by forming a conductive material layer on the insulating layer and the active region and patterning the conductive material layer. - View Dependent Claims (10, 11, 12)
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13. A method of manufacturing a driving device of a display apparatus, the method comprising:
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forming a gate electrode of an active device, a capacitor electrode, and a first electrode of a micro optical switch device by forming a conductive material layer on a substrate and patterning the conductive material layer, and forming an insulating layer; forming an active region on the insulating layer above the gate electrode; and forming a source region and a drain region of the active device. - View Dependent Claims (14, 15, 16)
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17. A method of manufacturing a driving device, the method comprising:
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disposing a first electrode on a substrate at the same time as at least one of a gate electrode and a capacitor electrode, and a source region and a drain region. disposing an insulating layer, an active region, a passivation layer, and a second electrode on the substrate.
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18. A driving device comprising:
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a first electrode disposed on a substrate at a same time and layer depth as at least one of a gate electrode and a capacitor electrode, and a source region and a drain region; and an insulating layer, an active region, a passivation layer, and a second electrode disposed on the substrate. - View Dependent Claims (19)
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Specification