APPARATUS TO PREVENT EXCESS MOVEMENT OF MEMS COMPONENTS

• US 20140133686A1
• Filed: 11/08/2013
• Published: 05/15/2014
• Est. Priority Date: 11/14/2012
• Status: Abandoned Application

• Current Assignee: Knowles Electronics Llc (Knowles Corporation)
• Original Assignee: Knowles Electronics Llc (Knowles Corporation)
• Inventors: Lee, Sung Bok
• Application Number:
  US14/075,799
• Publication Number:
  US 20140133686A1
• Time in Patent Office: Days
• US Class Current: 381/355
• CPC Class Codes: H04R 1/083 Special constructions of mouthpieces
• CPC Class Codes: H04R 2201/003 Mems transducers or their use of the electrostatic type H04R19/005

Abstract

An acoustic device includes a substrate, a microelectromechanical system (MEMS) apparatus, a cover, a port, and a stop. The MEMS apparatus includes a diaphragm and a back plate. The cover is coupled to the substrate and encloses the MEMS apparatus. The port is disposed through the substrate, and the MEMS apparatus is disposed over the port. The stop is disposed over the MEMS apparatus and configured to prevent movement of portions of the MEMS apparatus that would damage the portions of the MEMS apparatus.

Claims

1. An acoustic device, comprising:

a substrate;

a microelectromechanical system (MEMS) apparatus, the MEMS apparatus including a diaphragm and a back plate;

a cover, the cover coupled to the substrate and enclosing the MEMS apparatus;

a port, the port disposed through the substrate, the MEMS apparatus being disposed over the port;

a stop, the stop disposed over the MEMS apparatus and configured to prevent movement of portions of the MEMS apparatus that would damage the portions of the MEMS apparatus.

2. The acoustic device of claim 1 wherein the stop extends over and around the MEMS apparatus and is coupled to the substrate.

3. The acoustic device of claim 1 wherein the stop is coupled to the cover.

4. The acoustic device of claim wherein the stop is support by at least one pedestal.

5. The acoustic device of claim wherein the at least one pedestal is coupled to the substrate.

6. The acoustic device of claim wherein the portions of the MEMS apparatus for which damage is prevented from occurring comprises the back plate.

7. The acoustic device of claim wherein the portions of the MEMS apparatus for which damage is prevented from occurring comprises the diaphragm.

8. The acoustic device of claim wherein an application specific integrated circuit (ASIC) is disposed on the substrate.