DISPLAY DEVICE

• US 20140139772A1
• Filed: 10/16/2013
• Published: 05/22/2014
• Est. Priority Date: 11/20/2012
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Kim, Jeong-Hwan, Yoon, Joo-Sun, Kim, Kyung-Hye
• Granted Patent: US 8,841,666 B2
• Time in Patent Office: Days
• US Class Current: 349/43
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/124 Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/126 Shielding, e.g. light-blocking means over the TFTs

Abstract

In an aspect, a display device including: a substrate; a thin film transistor formed on the substrate, and comprising an active layer formed of an oxide semiconductor; a passivation layer formed on the thin film transistor; and a hydrogen blocking layer positioned between the active layer and the passivation layer is provided.

Claims

1. A display device, comprising:

a substrate;

a thin film transistor formed on the substrate, and comprising an active layer formed of an oxide semiconductor;

a passivation layer formed on the thin film transistor; and

a hydrogen blocking layer positioned between the active layer and the passivation layer, and including at least one selected from the group consisting of aluminum-neodymium (AlNd) oxide, aluminum-nickel-lanthanum (AlNiLa) oxide, aluminum-nickel-germanium-lanthanum (AlNiGeLa) oxide, and aluminum-cobalt-germanium-lanthanum (AlCoGeLa) oxide.

2. The display device of claim 1, wherein:

the oxide semiconductor includes at least one of an oxide including titanium (Ti), hafnium (Hf), zirconium (Zr), aluminum (Al), tantalum (Ta), germanium (Ge), zinc (Zn), gallium (Ga), tin (Sn), or indium (In).

3. The display device of claim 2, wherein:

the active layer has a thickness of 40 Å

to 500 Å

.

4. The display device of claim 1, wherein:

the thin film transistor comprises a gate electrode, and source/drain electrodes positioned on the gate electrode with a gate insulating layer interposed therebetween, and

the active layer is positioned between the source electrodes and the drain electrodes on the gate insulating layer.

5. The display device of claim 4, wherein:

an etching stopping layer is positioned on the active layer and the source/drain electrodes, and

the passivation layer is positioned on the etching stopping layer.

6. The display device of claim 5, wherein:

the hydrogen blocking layer is positioned between the etching stopping layer and the passivation layer.

7. The display device of claim 5, wherein:

the hydrogen blocking layer is directly on the active layer and the source/drain electrodes.

8. The display device of claim 5, wherein:

the hydrogen blocking layer comprises;

a first hydrogen blocking layer positioned between the etching stopping layer and the passivation layer; and

a second hydrogen blocking layer directly on the active layer and the source/drain electrodes.

9. The display device of claim 5, wherein:

the etching stopping layer includes silicon oxide, and

the passivation layer includes silicon nitride.

10. The display device of claims 4, further comprising:

a pixel electrode connected to the thin film transistor;

a second substrate disposed opposite to the substrate;

a common electrode formed on one surface of the second substrate facing the substrate; and

a liquid crystal layer positioned between the pixel electrode and the common electrode.

11. The display device of claim 1, wherein:

the thin film transistor comprises a gate electrode and source/drain electrodes; and

the active layer is positioned on a gate insulating layer covering the gate electrode,

an etching stopping layer is positioned on the active layer, and

the source/drain electrodes are positioned on the etching stopping layer, and are connected to the active layer through a via hole formed in the etching stopping layer.

12. The display device of claim 11, wherein:

the passivation layer is positioned on the source/drain electrodes.

13. The display device of claim 12, wherein:

the hydrogen blocking layer is positioned between the source/drain electrodes and the passivation layer.

14. The display device of claim 12, wherein:

the hydrogen blocking layer comprises;

a first hydrogen blocking layer positioned on the source/drain electrodes and the passivation layer; and

a second hydrogen blocking layer positioned between the etching stopping layer and the source/drain electrodes, and is formed with a via hole together with the etching stopping layer.

15. The display device of claim 12, wherein:

the hydrogen blocking layer is positioned between the active layer and the etching stopping layer, and is formed with a via hole together with the etching stopping layer.

16. The display device of claim 12, wherein:

the hydrogen blocking layer comprises;

a first hydrogen blocking layer positioned between the source/drain electrodes and the passivation layer; and

a second hydrogen blocking layer positioned between the active layer and the etching stopping layer, and is formed with a via hole together with the etching stopping layer.

17. The display device of claim 12, wherein:

the etching stopping layer and the passivation layer include silicon oxide.

18. The display device of claim 11, further comprising:

an organic light emitting diode comprising a pixel electrode connected with the thin film transistor, an organic emission layer formed on the pixel electrode, and a common electrode formed on the organic emission layer; and

an encapsulation member configured to seal the organic light emitting diode.

19. The display device of claim 18, wherein:

the substrate and the encapsulation member have a bending property.

20. The display device of claim 18, wherein:

the organic emission layer comprises a red organic emission layer, a green organic emission layer, and a blue organic emission layer, or comprises a white organic emission layer.