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SPRING FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE

  • US 20140144232A1
  • Filed: 11/28/2012
  • Published: 05/29/2014
  • Est. Priority Date: 11/28/2012
  • Status: Abandoned Application
First Claim
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1. A microelectromechanical systems (MEMS) device comprising:

  • a substrate having a surface;

    a drive mass configured to undergo oscillatory motion within a plane substantially parallel to said surface; and

    drive springs, each of said drive springs including a first beam and a second beam coupled to an end of said first beam, said second beam being anchored to one of said drive mass and said substrate, said first beam exhibiting a first width substantially parallel to said plane, and said second beam exhibiting a second width substantially parallel to said plane, said second width being less than said first width.

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