SPRING FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE
First Claim
1. A microelectromechanical systems (MEMS) device comprising:
- a substrate having a surface;
a drive mass configured to undergo oscillatory motion within a plane substantially parallel to said surface; and
drive springs, each of said drive springs including a first beam and a second beam coupled to an end of said first beam, said second beam being anchored to one of said drive mass and said substrate, said first beam exhibiting a first width substantially parallel to said plane, and said second beam exhibiting a second width substantially parallel to said plane, said second width being less than said first width.
20 Assignments
0 Petitions
Accused Products
Abstract
A MEMS device (20) includes a substrate (28) and a drive mass (30) configured to undergo oscillatory motion within a plane (24) substantially parallel to a surface (50) of the substrate (28). The sensor (20) further includes drive springs (56), each of which includes a principal beam (70) and a flexion beam (72) coupled an end (74) of the principal beam (70). The flexion beam (72) is anchored to the drive mass (30) or the substrate (28). The flexion beam (72) exhibits a width (90) that is less than a width (88) of the principal beam (70). In response to oscillatory drive motion, the flexion beam (72) flexes so that the principal beam (70) rotates about a pivot point (96) within the plane (24). Thus, out-of-plane movement of the drive mass (30) is reduced thereby suppressing quadrature error.
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Citations
20 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a substrate having a surface; a drive mass configured to undergo oscillatory motion within a plane substantially parallel to said surface; and drive springs, each of said drive springs including a first beam and a second beam coupled to an end of said first beam, said second beam being anchored to one of said drive mass and said substrate, said first beam exhibiting a first width substantially parallel to said plane, and said second beam exhibiting a second width substantially parallel to said plane, said second width being less than said first width. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A microelectromechanical systems (MEMS) device comprising:
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a substrate having a surface; a drive mass configured to undergo oscillatory motion within a plane substantially parallel to said surface; a suspended mass; and drive springs connecting said suspended mass with said drive mass, each of said drive springs including a first beam and a second beam coupled to an end of said first beam, said second beam being anchored to one of said drive mass and said suspended mass, said first beam exhibiting a first width substantially parallel to said plane, and said second beam exhibiting a second width substantially parallel to said plane, said second width being less than said first width, wherein an intersection of said second beam with said first beam forms a pivot point, and said second beam flexes to enable pivotal motion of said first beam within said plane about said pivot point in response to said oscillatory motion. - View Dependent Claims (16, 17, 18)
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19. A microelectromechanical systems (MEMS) device comprising:
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a substrate having a surface; a drive mass configured to undergo oscillatory motion within a plane substantially parallel to said surface; a suspended mass; and drive springs connecting said suspended mass with said drive mass, each of said drive springs including; a first beam exhibiting a first width substantially parallel to said plane; a second beam coupled to a first end of said first beam, said second beam being anchored to said drive mass, said second beam exhibiting a second width substantially parallel to said plane, said second width being less than said first width; and a third beam coupled to a second end of said first beam, said third beam being anchored to said suspended mass, said third beam exhibiting a third width substantially parallel to said plane, said third width being less than said first width, wherein in response to said oscillatory motion, said second width of said second beam and said third width of said third beam enable flexion of said second and third beams relative to said first beam so that motion of said first beam occurs substantially within said plane. - View Dependent Claims (20)
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Specification