ACCELERATION SENSOR
First Claim
1. An acceleration sensor comprising:
- a substrate;
a weight that is movably arranged apart from the substrate; and
an electrostatic capacitor, equipped with fixed electrodes and movable electrodes, of which electrostatic capacity varies according to distance between each of the fixed electrodes and each of the movable electrodes in a detection direction, the distance varying according to an acceleration working in the detection direction that is parallel to a flat surface direction of the substrate,wherein, the electrostatic capacitor is arranged at center of a region surrounded by a periphery of the weight in a plane view of the substrate, so that each of the fixed electrodes and each of the movable electrodes are arranged alternately in a row along the detection direction.
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Accused Products
Abstract
An acceleration sensor achieving improvement of sensitivity and comprehensive miniaturization as a device includes a first sensor. The first sensor is furnished with an electrostatic capacitor that is configured such that a first fixed electrode, a second fixed electrode and a movable electrode are intensively arranged in a row. In the electrostatic capacitor, the first fixed electrode, the second fixed electrode and the movable electrode are arranged adjoining one another in acceleration detection direction (y-axis direction) at a position corresponding to the center of a weight in a plane view of a substrate. At one of longitudinal-side'"'"'s ends of each electrode (one of ends in x-axis direction), connectors are provided so as to connect the first fixed electrode and the second fixed electrode to the substrate by connectors.
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Citations
12 Claims
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1. An acceleration sensor comprising:
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a substrate; a weight that is movably arranged apart from the substrate; and an electrostatic capacitor, equipped with fixed electrodes and movable electrodes, of which electrostatic capacity varies according to distance between each of the fixed electrodes and each of the movable electrodes in a detection direction, the distance varying according to an acceleration working in the detection direction that is parallel to a flat surface direction of the substrate, wherein, the electrostatic capacitor is arranged at center of a region surrounded by a periphery of the weight in a plane view of the substrate, so that each of the fixed electrodes and each of the movable electrodes are arranged alternately in a row along the detection direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification