VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

• US 20140145551A1
• Filed: 11/18/2013
• Published: 05/29/2014
• Est. Priority Date: 11/29/2012
• Status: Abandoned Application

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Inaba, Shogo, Fujii, Masahiro
• Application Number:
  US14/082,537
• Publication Number:
  US 20140145551A1
• Time in Patent Office: Days
• US Class Current: 310/300
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing

Abstract

A vibrator includes: a vibrating portion; a support portion extended from the vibrating portion; and a fixing portion disposed at the support portion, wherein the support portion includes a first beam portion extending in a first direction from the vibrating portion and a second beam portion extending in a second direction intersecting the first direction.

Claims

1. A vibrator comprising:

a vibrating portion;

a support portion extended from the vibrating portion; and

a fixing portion disposed at the support portion, wherein

the support portion includes a first beam portion extending in a first direction from the vibrating portion and a second beam portion extending in a second direction intersecting the first direction.

2. The vibrator according to claim 1, wherein

the support portion includes a third beam portion extending in a third direction intersecting the second direction.

3. The vibrator according to claim 2, wherein

the support portion includes a fourth beam portion extending in a fourth direction intersecting the third direction and a fifth beam portion extending in a fifth direction intersecting the fourth direction.

5. The vibrator according to claim 1, wherein

a plurality of the support portions are extended from the vibrating portion.

6. The vibrator according to claim 1, wherein

the support portion is disposed, in a direction intersecting a direction in which the support portion is extended, at positions that are point symmetrical about a point on an imaginary line passing through the center of the vibrator.

8. An electronic apparatus comprising the vibrator according to claim 1.

9. A moving object comprising the vibrator according to claim 1.

4. A vibrator comprising:

a vibrating portion;

a support portion extended from the vibrating portion; and

a fixing portion disposed at the support portion, wherein

the support portion is disposed to be wound around the fixing portion.

7. A manufacturing method of a vibrator including a vibrating portion, a support portion extended from the vibrating portion, and a fixing portion disposed at the support portion, wherein the support portion includes a first beam portion extending in a first direction from the vibrating portion and a second beam portion extending in a second direction intersecting the first direction,

the method comprising:

forming the vibrating portion and the support portion; and

forming the fixing portion and a lower electrode, wherein

the forming of the vibrating portion and the support portion includes forming at least two beam portions that are extended in different directions.