Miniaturized Integrated Micro Electro-Mechanical Systems (MEMS) Optical Sensor Array
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Abstract
This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label-free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.
9 Citations
106 Claims
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1-57. -57. (canceled)
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58. An apparatus for sensing dynamic changes such as mass or viscosity comprising:
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a disposable cartridge having at least one micro-electromechanical sensor; at least one light source coupled to the at least one micro-electromechanical sensor; at least one photodetector coupled to the at least one micro-electromechanical sensor and the light source; and a control electronics coupled to at least one actuation means; wherein the at least one actuation means can be removably coupled to the at least one micro-electromechanical sensor and wherein the control electronics and user interface can be removably coupled to the at least one photodetector. - View Dependent Claims (59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69)
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70. An apparatus for a parallel readout sensor comprising:
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a disposable cartridge, at least two vibrating mechanical structures that vibrate at a different resonant frequency on the disposable cartridge; at least one light source coupled with the vibrating mechanical structures; at least one photodetector that allows the sensor to simultaneous readout from the at least two vibrating mechanical structures without a parallel array; at least one actuation means which is a single coil that couples to the vibrating mechanical structures. - View Dependent Claims (71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85)
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86. A magnetically actuated sensor comprising:
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at least one vibrating mechanical structure comprising a magnetic material; at least one light source coupled with the vibrating mechanical structure; at least one photodetector coupled with the vibrating mechanical structure; at least one actuating means that couples to the vibrating mechanical structure and a disposable cartridge coupled to the magnetically actuated sensor. - View Dependent Claims (87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98)
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99. An apparatus for sensing dynamic changes such as mass or viscosity comprising:
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at least one actuation means; at least one vibrating mechanical structure coupled to the at least one actuating means; at least one light source coupled with the at least one vibrating mechanical structure; at least one interference means coupled with each vibrating mechanical structure and the at least one light source; and at least one photodetector monitoring light reflected from the at least one interference means; and at least one heating element coupled to each vibrating mechanical structure for heating the at least one vibrating mechanical structure and wherein the heating of the at least one vibrating mechanical structure may be scanned by the at least one heating element. - View Dependent Claims (100, 101, 102, 103, 104, 105, 106)
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Specification