SCHEDULER FOR PROCESSING SYSTEM

• US 20140148924A1
• Filed: 11/29/2012
• Published: 05/29/2014
• Est. Priority Date: 11/29/2012
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holding B.V. (ASM International NV)
• Inventors: Brak, Maarten, van Kesteren, Tom A.
• Granted Patent: US 9,146,551 B2
• Time in Patent Office: Days
• US Class Current: 700/12
• CPC Class Codes: G05B 19/02 electric
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 2219/32271 Decision of job dispatching, select job to process next on each machine
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67313 Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
• CPC Class Codes: H01L 21/67757 vertical transfer of a batch of workpieces
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A semiconductor processing system that includes a controller is disclosed. The controller may be configured to schedule the operation of the system. The controller may be programmed to determine a current state of the system. The current state may be defined at least by a location of one or more substrates and a processing status of the one or more substrates. The controller may be further programmed to generate a search tree having one or more branches. Each branch may identify one or more subsequent actions or branch pathways capable of being performed by the system in the current state. Further, the controller may be programmed to score each branch pathway of the generated search tree. The controller may be programmed to select a branch pathway and provide instructions to perform the actions in that branch pathway based at least in part on the score of the branch pathway.

Claims

1. A semiconductor processing system, comprising:

a controller configured to schedule the operation of the processing system, the controller programmed to;

determine a current state of the system, the current state being defined at least by a location of one or more substrates and a processing status of the one or more substrates;

generate a search tree having one or more branch pathways, each branch pathway identifying one or more sequences of subsequent actions that are capable of being performed by the system in the current state;

score each branch pathway of the generated search tree; and

select a branch pathway based at least in part on the score of the branch pathway.

2. The system of claim 1, wherein the controller is programmed to instruct the system to perform the one or more identified subsequent actions in the selected branch pathway of the search tree.

3. The system of claim 1, wherein each branch pathway and each action in a branch pathway has an associated duration, wherein additional branch pathways are generated or additional actions in each branch pathway are identified until the total duration elapsed by the generated branch pathways or identified actions in each branch pathway reaches a pre-determined time horizon.

4. The system of claim 3, wherein the pre-determined time horizon is in a range of about 10 minutes to about 45 minutes.

5. The system of claim 1, wherein the controller, for each identified subsequent action of the one or more identified subsequent actions, is further programmed to, for each of the identified subsequent actions:

determine a subsequent state of the system if the identified subsequent action is performed, the subsequent state being defined at least by a location of one or more substrates and a processing status of the one or more substrates; and

analyze the subsequent state to determine a set of one or more actions that are capable of being performed when the system is in the subsequent state.

6. The system of claim 1, wherein the controller is programmed to score each branch pathway based at least in part on the amount of time it takes to perform each action of the branch pathway.

7. The system of claim 1, wherein the controller is programmed to score each branch pathway based at least in part on an amount of time that a reactor of the system is idle.

8. The system of claim 7, wherein the controller is programmed to penalize branch pathways of the search tree that increase the idle time of the reactor.

9. The system of claim 1, wherein the controller is programmed to score each branch pathway based at least in part on a processing status of each of the one or more substrates.

10. The system of claim 9, wherein the controller is programmed to score each branch pathway based at least in part on the ability of each substrate to proceed to a subsequent processing step.

11. The system of claim 1, further comprising one or more boats, wherein the controller is programmed to score each branch pathway based at least in part on a processing status of each boat of the one or more boats.

12. The system of claim 11, wherein the controller is programmed to score each branch pathway based at least in part on the ability of each boat to proceed to a subsequent processing step.

13. The system of claim 12, wherein the controller is programmed to penalize branch pathways of the search tree that create processing bottlenecks.

14. The system of claim 13, wherein the controller is programmed to assign a negative or fractional weight to branch pathways that create processing bottlenecks.

15. The system of claim 1, wherein the controller is programmed to select the branch pathway having a shortest time for completing a largest number of steps in a process sequence for the one or more substrates.

16. The system of claim 1, wherein the controller is further programmed to repetitively determine the current state of the system, generate the search tree, score each branch pathway, and select a branch pathway of identified action(s) to be performed.

17. The system of claim 1, further comprising a reactor module, the reactor module comprising:

a first reactor; and

a transfer device configured to transfer a boat of the substrates at least between an exchange position and the first reactor.

18. The system of claim 17, the reactor module further comprising:

a second reactor; and

a rotatable carousel having at least two carousel positions configured to support the boat of the substrates, the carousel configured to transfer the boat of the substrates at least between the first reactor and the second reactor, wherein the current state of the system is further defined at least by an orientation of the carousel.

19. The system of claim 18, wherein the rotatable carousel is configured to position a first boat of substrates located in a first carousel position underneath the first reactor and a second boat of substrates located in a second carousel position underneath the second reactor.

20. The system of claim 18, wherein the transfer device is configured to:

exchange one or more substrate holders in a boat at the exchange position; and

transfer a boat of substrates at least between the exchange position and the carousel.

21. The system of claim 18, wherein the current state of the system is further defined by one or more of:

an amount of time until a boat is scheduled to enter the first reactor;

an amount of time in which a process is scheduled to continue in the first reactor; and

an amount of time until a boat is scheduled to leave the first reactor.

22. The system of claim 21, the reactor module further comprising:

a first boat elevator configured to move a boat of substrates from the carousel into the first reactor; and

a second boat elevator configured to move a boat of substrates from the carousel into the second reactor.

23. The system of claim 22, wherein the current state of the system is further defined by a position of the first boat elevator and a position of the second boat elevator.

24. The system of claim 1, further comprising a plurality of boats, each boat configured to support multiple substrates, wherein the current state of the system is further defined by the positions of the plurality of boats.

25. The system of claim 24, wherein the current state of the system is further defined by at least one of:

an amount of time that each boat is scheduled to cool down; and

a subsequent process step for each boat.

26. The system of claim 18, wherein the one or more actions that are capable of being performed when the reactor module is in the current state includes at least one of:

rotating the carousel by 90°

;

rotating the carousel by 180°

;

removing a boat from the carousel using the transfer device;

placing a boat on the carousel using the transfer device;

exchanging substrates in a boat at the exchange position;

positioning a boat in the first reactor or the second reactor;

processing a boat;

removing a boat from the first reactor or the second reactor; and

cooling a boat.

27. The system of claim 1, wherein the controller is further programmed to store previously-visited states and to exclude previously-visited states from the generated search tree.

28. The system of claim 1, wherein the controller is further programmed to exclude useless or non-productive actions from the generated search tree.

29. The system of claim 1, wherein the controller is further programmed to generate branch pathways of the search tree that include multiple actions to be performed simultaneously.

30. The system of claim 1, wherein the controller is further programmed to adapt to changing system conditions in real-time.

39. The system of claim 1, wherein the system is a cluster tool processing system, the system further comprising a plurality of substrate processing stations in communication with the controller.

40. The system of claim 39, wherein each processing station is configured to process a single substrate at a time.

41. The system of claim 39, wherein the processing stations are arrayed around a central transfer station.

42. The system of claim 39, wherein each processing station is configured to apply a different type of process to one or more substrates accommodated in the processing station.

43. The system of claim 39, wherein each processing station includes one or more of:

a deposition chamber, an etching chamber, a lithographic station, and a cooling station.

44. The system of claim 39, further comprising a first IO station configured to provide unprocessed substrates into the processing stations or to receive processed substrates from the processing stations.

45. The system of claim 44, further comprising a manipulator configured to move substrates from the first IO station to or from the one or more processing stations.

31. A method for semiconductor processing, the method comprising:

determining a current state of a semiconductor processing system, the current state being defined at least by a location of one or more substrates and a processing status of the one or more substrates;

generating a search tree having one or more branch pathways, each branch pathway identifying one or more sequences of subsequent actions that are capable of being performed when the system is in the current state;

scoring each branch pathway of the generated search tree; and

selecting a branch of pathway based at least in part on the score of the branch pathway.

32. The method of claim 31, further comprising performing the one or more identified subsequent actions in the selected branch pathway of the search tree.

33. The method of claim 31, wherein each branch pathway and each action in a branch pathway has an associated duration, wherein additional branch pathways are generated or additional actions in each branch pathway are identified until the total duration elapsed by the generated branch pathways or actions in each branch pathway reaches a pre-determined time horizon.

34. The method of claim 31, for each identified subsequent action of the one or more identified subsequent actions, further comprising:

determining a subsequent state of the system if the identified subsequent action is performed, the subsequent state being defined at least by a location of one or more substrates and a processing status of the one or more substrates; and

analyzing the subsequent state to determine a set of one or more actions that are capable of being performed when the system is in the subsequent state.

35. The method of claim 31, further comprising scoring each branch pathway based at least in part on an amount of time that a reactor of the system is idle.

36. The method of claim 31, further comprising scoring each branch pathway based at least in part on the processing status of each boat of one or more boats.

37. The method of claim 31, further comprising scoring each branch pathway based at least in part on the ability of each boat to proceed to a subsequent processing step.

38. A non-transitory computer-readable medium having stored thereon code that when executed performs the method of claim 31.