GLASS SEALING WITH TRANSPARENT MATERIALS HAVING TRANSIENT ABSORPTION PROPERTIES
First Claim
Patent Images
1. A method of protecting a workpiece comprising:
- forming a low Tg glass sealing layer over a major surface of a first glass substrate;
arranging a workpiece to be protected between the first substrate and a second substrate where the sealing layer is in contact with the second substrate; and
locally heating the glass sealing layer and the glass substrates with laser radiation to melt the sealing layer and the glass substrates to form a glass seal between the substrates.
1 Assignment
0 Petitions
Accused Products
Abstract
Transparent glass-to-glass hermetic seals are formed by providing a low melting temperature sealing glass along a sealing interface between two glass substrates and irradiating the interface with laser radiation. Absorption by the sealing glass and induced transient absorption by the glass substrates along the sealing interface causes localized heating and melting of both the sealing glass layer and the substrate materials, which results in the formation of a glass-to-glass weld. Due to the transient absorption by the substrate material, the sealed region is transparent upon cooling.
40 Citations
28 Claims
-
1. A method of protecting a workpiece comprising:
-
forming a low Tg glass sealing layer over a major surface of a first glass substrate; arranging a workpiece to be protected between the first substrate and a second substrate where the sealing layer is in contact with the second substrate; and locally heating the glass sealing layer and the glass substrates with laser radiation to melt the sealing layer and the glass substrates to form a glass seal between the substrates. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. A method of sealing a device comprising the steps of:
-
forming a sealing layer over a surface of a first substrate; arranging a device to be sealed between the first substrate and a second substrate where the sealing layer is in contact with the second substrate to thereby form an interface between the first substrate, sealing layer and second substrate; locally heating the interface using laser radiation to cause a local increase in temperature at the interface and to melt the sealing layer at the interface; altering absorption characteristics of portions of the first substrate and second substrate adjacent the interface as a function of the local increase in temperature; melting the portions of the first substrate and second substrate as a function of the altered absorption characteristics; and sealing the device between the first and second substrates by the melted sealing layer and melted portions of the first and second substrates. - View Dependent Claims (15, 16, 17, 18)
-
-
19. A sealed device comprising:
-
a glass film formed over a surface of a first substrate; and a device protected between the first substrate and a second substrate wherein the glass film is in contact with the second substrate, wherein the device is hermetically sealed between the first and second substrates as a function of the composition of impurities in the first or second substrates and as a function of the composition of the glass film though a local heating of the glass film with laser radiation having a predetermined wavelength. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
-
Specification