Measurement Microscope Device, Image Generating Method, Measurement Microscope Device Operation Program, And Computer-Readable Recording Medium

• US 20140152794A1
• Filed: 10/01/2013
• Published: 06/05/2014
• Est. Priority Date: 11/30/2012
• Status: Active Grant

• Current Assignee: Keyence Corporation (Keyence)
• Original Assignee: Keyence Corporation (Keyence)
• Inventors: Takahashi, Shinya
• Granted Patent: US 9,291,450 B2
• Time in Patent Office: Days
• US Class Current: 348/79
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: G01B 11/2531 using several gratings, projected with variable angle of incidence on the object, and one detection device
• CPC Class Codes: G01B 2210/52 Combining or merging partially overlapping images to an overall image
• CPC Class Codes: G01B 9/04 Measuring microscopes
• CPC Class Codes: G02B 21/0016 Technical microscopes, e.g. for inspection or measuring in industrial production processes
• CPC Class Codes: G02B 21/367 providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
• CPC Class Codes: G06V 10/145 Illumination specially adapted for pattern recognition, e.g. using gratings
• CPC Class Codes: G06V 10/457 by analysing connectivity, e.g. edge linking, connected component analysis or slices
• CPC Class Codes: G06V 20/653 by matching three-dimensional models, e.g. conformal mapping of Riemann surfaces
• CPC Class Codes: G06V 20/66 Trinkets, e.g. shirt buttons or jewellery items recognising microscopic objects G06V20/69
• CPC Class Codes: G06V 20/693 Acquisition

Abstract

An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.

Claims

1. A measurement microscope device comprising:

a first measurement light projecting unit configured to irradiate an object with first measurement light from a first direction, the unit being a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction;

an observation illumination light source for generating illumination light when capturing an observation image;

an imaging unit for acquiring measurement light projected by the first measurement light projecting unit and reflected by the object to capture a plurality of striped images, and using the observation illumination light source to capture an observation image having texture information;

a height image acquiring unit for acquiring a height image having height information based on the plurality of striped images;

a stage on which the object is placed;

a display unit for displaying the height image or the observation image;

a measurement unit for performing measurement on the height image displayed on the display unit;

an image connecting unit configured to, by moving the stage and capturing a different region including a connection margin by the imaging unit, acquire a plurality of height images for connection and observation images for connection, and connect the obtained plurality of height images for connection and observation images for connection to generate a connected image;

a measurement error region display unit configured to superimpose and display a measurement error region, where a result of measurement of the height is error, on an image of the object corresponding to each region to be connected by the image connecting unit; and

a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region in a state where the measurement error region is displayed.

2. The measurement microscope device according to claim 1, wherein

the connected image or the image for connection is a three-dimensional composite image formed by combining an observation image captured using the observation illumination light source and a height image captured using the measurement light projecting unit.

3. The measurement microscope device according to claim 1, wherein

the image connecting unit specifies a predetermined region of the object as a connected region to divide the connected region into a plurality of sub regions, while respectively capturing by the imaging unit a height image for connection and an observation image for connection including the connection margin with respect to each of the sub regions, and connects the obtained plurality of height images for connection and observation images for connection, to generate a connected image showing the connected region.

4. The measurement microscope device according to claim 1, further comprising:

a second measurement light projecting unit, as the measurement light projecting unit, configured to irradiate the object with second measurement light from a second direction different from the first direction, wherein

the imaging conditions set by the measurement-image imaging condition setting unit include a measurement direction indicating a direction of the measurement light and brightness of a measurement image.

5. The measurement microscope device according to claim 4, wherein

the measurement error region display unit is configured to superimpose and display a measurement error region, where a result of measurement of the height by at least one of the first measurement light projecting unit and the second measurement light projecting unit is error in a state where the height image for connection formed by projecting the measurement light in the predetermined pattern is displayed on the display unit.

6. The measurement microscope device according to claim 1, wherein the imaging conditions for the plurality of observation images for connection are held uniform.

7. The measurement microscope device according to claim 1, wherein the stage is configured to be manually movable.

8. The measurement microscope device according to claim 1, further comprising a stage driving unit for automatically driving the stage.

9. The measurement microscope device according to claim 8, wherein

an automatic image connection mode is executable in which the image connecting unit moves the stage by the stage driving unit, and automatically captures a plurality of height images for connection and observation images for connection, to generate a connected image.

10. The measurement microscope device according to claim 9, wherein

when the measurement error region is included in any of the images for connection captured in the automatic image connection mode, a recovery mode for changing the measurement-image imaging condition and recapturing all or part of the images for connection is executable.

11. The measurement microscope device according to claim 3, wherein the image connecting unit is configured to specify a starting point and an end point of the connected region in order to divide the connected region into a plurality of sub regions.

12. The measurement microscope device according to claim 3, wherein the image connecting unit is configured to specify a starting point of the connected region and a longitudinal length and a lateral length of the connected region in order to divide the connected region into a plurality of sub regions.

13. The measurement microscope device according to claim 1, wherein the image connecting unit is configured to specify a starting point of the connected region and the numbers of observation images for connection and height images for connection in order to divide the connected region into a plurality of sub regions.

14. The measurement microscope device according to claim 1, wherein the measurement error region display unit is configured to display an area with insufficient measurement light without measuring the height in a state where the measurement image formed by projecting the measurement light in the predetermined pattern is displayed on the display unit.

15. The measurement microscope device according to claim 1, wherein the measurement error region display unit is configured to distinguish and display an area with insufficient measurement light by implementing measurement on the height in a state where the measurement image formed by projecting the measurement light in the predetermined pattern is displayed on the display unit.

16. The measurement microscope device according to claim 1, wherein

the measurement-image imaging condition is adjusted in a state where the measurement error region is displayed by the measurement error region display unit on the observation image or the measurement image displayed on the display unit, and

in a state where a height image acquired on the adjusted measurement-image imaging condition is further displayed on the display unit, the measurement error region is displayed by the measurement error region display unit on the height image, and the measurement-image imaging condition is readjusted, to generate the height image again.

17. An image generating method using a measurement microscope device which includes

a first measurement light projecting unit configured to irradiate an object with first measurement light from a first direction, the unit being a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction,

an observation illumination light source for generating illumination light when capturing an observation image,

an imaging unit for acquiring measurement light projected by the first measurement light projecting unit and reflected by the object to capture a plurality of striped images, and using the observation illumination light source to capture an observation image having texture information,

a height image acquiring unit for acquiring a height image having height information based on the plurality of striped images,

a stage on which the object is placed,

a display unit for displaying the height image or the observation image, and

a measurement unit for performing measurement on the height image displayed on the display unit,

the method comprising the steps of;

moving the stage and capturing a different region including a connection margin by the imaging unit to acquire a height image for connection and an observation image for connection;

superimposing and displaying a measurement error region, where a result of measurement of the height is error, on an image of the object corresponding to each region for connecting the height images for connection to one another;

prompting, as necessary, adjustment of an imaging condition to an imaging condition that reduces the measurement error region in a state where the measurement error region is displayed;

acquiring a height image for connection and an observation image for connection on the set imaging condition; and

connecting the obtained plurality of height images for connection and observation images for connection to generate a connected image.

18. An operation program for a measurement microscope device which includes

a first measurement light projecting unit configured to irradiate an object with first measurement light from a first direction, the unit being a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction,

an observation illumination light source for generating illumination light when capturing an observation image,

an imaging unit for acquiring measurement light projected by the first measurement light projecting unit and reflected by the object to capture a plurality of striped images, and using the observation illumination light source to capture an observation image having texture information,

a height image acquiring unit for acquiring a height image having height information based on the plurality of striped images, and

a stage on which the object is placed, wherein

the program causes a computer to realize:

a display function for displaying the height image or the observation image;

a measurement function for performing measurement on the height image displayed by the display function;

an image connection function of moving the stage and capturing a different region including a connection margin by the imaging unit to acquire a height image for connection and an observation image for connection, and connecting the obtained plurality of height images for connection and observation images for connection to generate a connected image;

a measurement error region display function of superimposing and displaying a measurement error region, where a result of measurement of the height is error, on an image of the object corresponding to each region for connecting the height images for connection to one another; and

a function of prompting, as necessary, adjustment of an imaging condition to an imaging condition that reduces the measurement error region in a state where the measurement error region is displayed by the measurement error region display function.

19. A computer-readable recording medium in which the program according to claim 18 is recorded.