OPTICAL APPARATUS
First Claim
1. An optical apparatus comprising:
- a laser light source;
an objective configured to irradiate a sample with laser light from the laser light source;
a phase-modulation spatial light modulator located at a position optically conjugate to a pupil position of the objective and configured to modulate a phase of the laser light;
a scan unit configured to scan the sample with the laser light so as to generate an image of the sample;
a detector configured to detect observation light from the sample;
an image generating unit configured to generate an image of the sample according to a signal from the detector and control information of the scan unit; and
a controlling unit configured to set, for the phase-modulation spatial light modulator, a modulation amount of modulation of the phase of the laser light in accordance with a pattern to be formed on the sample using the laser light, whereinaccording to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator.
3 Assignments
0 Petitions
Accused Products
Abstract
An optical apparatus includes: laser; objective that irradiates a sample with laser light; phase-modulation spatial light modulator that is located at a pupil conjugate position of the objective and modulates a phase of the laser light; scan unit that scans the sample with the laser light; detector that detects observation light from the sample; image generating unit that generates a sample image according to a signal from the detector and control information of the scan unit; and controlling unit that sets for the modulator a modulation amount of the phase of laser light in accordance with a pattern to be formed on the sample using the laser light. According to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the modulator.
30 Citations
9 Claims
-
1. An optical apparatus comprising:
-
a laser light source; an objective configured to irradiate a sample with laser light from the laser light source; a phase-modulation spatial light modulator located at a position optically conjugate to a pupil position of the objective and configured to modulate a phase of the laser light; a scan unit configured to scan the sample with the laser light so as to generate an image of the sample; a detector configured to detect observation light from the sample; an image generating unit configured to generate an image of the sample according to a signal from the detector and control information of the scan unit; and a controlling unit configured to set, for the phase-modulation spatial light modulator, a modulation amount of modulation of the phase of the laser light in accordance with a pattern to be formed on the sample using the laser light, wherein according to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
Specification