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MASK CLEANER AND CLEANING METHOD

  • US 20140158157A1
  • Filed: 06/20/2013
  • Published: 06/12/2014
  • Est. Priority Date: 12/12/2012
  • Status: Active Grant
First Claim
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1. A mask cleaner comprising:

  • a cleaner support casing having a major surface with a recess formed therein, another major surface, and a gas supply hole and a gas exhaust hole extending through the cleaner support casing between the another major surface and the recess;

    a flat sticky layer support board attached to the cleaner support casing to block an opening of the recess of the cleaner support casing; and

    a sticky layer configured to be used for removal of particles on a surface of a mask, the sticky layer being attached to a surface of the sticky layer support board remote from the cleaner support casing.

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  • 5 Assignments
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