MASK CLEANER AND CLEANING METHOD
First Claim
Patent Images
1. A mask cleaner comprising:
- a cleaner support casing having a major surface with a recess formed therein, another major surface, and a gas supply hole and a gas exhaust hole extending through the cleaner support casing between the another major surface and the recess;
a flat sticky layer support board attached to the cleaner support casing to block an opening of the recess of the cleaner support casing; and
a sticky layer configured to be used for removal of particles on a surface of a mask, the sticky layer being attached to a surface of the sticky layer support board remote from the cleaner support casing.
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Abstract
According to one embodiment, a mask cleaner includes a cleaner support casing having a major surface with a recess formed therein, another major surface, and a gas supply hole and a gas exhaust hole extending through the cleaner support casing between the another major surface and the recess, a sticky layer support board attached to the cleaner support casing to block an opening of the recess of the cleaner support casing, and a sticky layer attached to a surface of the sticky layer support board remote from the cleaner support casing.
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Citations
15 Claims
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1. A mask cleaner comprising:
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a cleaner support casing having a major surface with a recess formed therein, another major surface, and a gas supply hole and a gas exhaust hole extending through the cleaner support casing between the another major surface and the recess; a flat sticky layer support board attached to the cleaner support casing to block an opening of the recess of the cleaner support casing; and a sticky layer configured to be used for removal of particles on a surface of a mask, the sticky layer being attached to a surface of the sticky layer support board remote from the cleaner support casing. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A mask cleaner comprising:
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a chamber containing a mask stage with a mask placed thereon; a cleaner support casing having a major surface with a recess formed therein, the cleaner support casing having a gas supply hole and a gas exhaust hole extending therethrough between another major surface and the recess; a gas supply pipe provided with a gas supply valve and connected to the gas supply hole; a gas exhaust pipe provided with a gas exhaust valve and connected to the gas exhaust hole; a flat sticky layer support board attached to the cleaner support casing to block an opening of the recess of the cleaner support casing; and a sticky layer configured to be used for removal of particles on a surface of a mask, the sticky layer being attached to a surface of the sticky layer support board remote from the cleaner support casing. - View Dependent Claims (8, 9, 10, 11)
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12. A cleaning method comprising:
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preparing a mask cleaner, the mask cleaner including;
a cleaner support casing having a major surface with a recess formed therein, another major surface, and a gas supply hole and a gas exhaust hole extending through the cleaner support casing between the another major surface and the recess;
a flat sticky layer support board attached to the cleaner support casing to block an opening of the recess of the cleaner support casing; and
a sticky layer attached to a surface of the sticky layer support board remote from the cleaner support casing;supplying a gas into the recess through the gas supply hole to project a central portion of the sticky layer of the mask cleaner; bringing the projected portion of the sticky layer into a major surface of a mask; exhausting the gas in the recess through the gas exhaust hole to return the sticky layer to a flat state and put the sticky layer into close contact with the major surface of the mask; and supplying the gas into the recess through the gas supply hole to project the central portion of the sticky layer, and to separate the sticky layer from the major surface of the mask such that the mask is separated beginning with a peripheral portion thereof. - View Dependent Claims (13, 14, 15)
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Specification