METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN FLUIDS
First Claim
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1. An apparatus for cleaning a substrate, comprising:
- a chamber having a cavity in a form of a conduit, the conduit being capable of conveying a flow of a non-Newtonian fluid such that a portion of the flow exhibits plug flow, the chamber being configured to contain the substrate such that the plug flow moves over a surface of the substrate to enable removal of particles from the surface.
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Abstract
A method for cleaning a substrate is provided. In this method, a flow of non-Newtonian fluid is provided where at least a portion of the flow exhibits plug flow. To remove particles from a surface of the substrate, the surface of the substrate is placed in contact with the portion of the flow that exhibits plug flow such that the portion of the flow exhibiting plug flow moves over the surface of the substrate. Additional methods and apparatuses for cleaning a substrate also are described.
3 Citations
10 Claims
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1. An apparatus for cleaning a substrate, comprising:
a chamber having a cavity in a form of a conduit, the conduit being capable of conveying a flow of a non-Newtonian fluid such that a portion of the flow exhibits plug flow, the chamber being configured to contain the substrate such that the plug flow moves over a surface of the substrate to enable removal of particles from the surface. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An apparatus for cleaning a substrate, comprising:
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a chamber having walls that define a cavity in a form of a conduit, the chamber having an input end defined by a first opening for receiving a substrate and an output end defined by a second opening for outputting the substrate; at least one input port defined in a wall of the chamber for porting a non-Newtonian fluid into the chamber; at least one holding pin disposed within the chamber, the at least one holding pin receiving an edge of the substrate to prevent movement of the substrate as the non-Newtonian fluid flows through the chamber; and a panel proximate to the input end defined by the first opening, the panel being capable of closing off the input end defined by the first opening. - View Dependent Claims (8, 9, 10)
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Specification