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METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN FLUIDS

  • US 20140158167A1
  • Filed: 02/11/2014
  • Published: 06/12/2014
  • Est. Priority Date: 06/15/2005
  • Status: Abandoned Application
First Claim
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1. An apparatus for cleaning a substrate, comprising:

  • a chamber having a cavity in a form of a conduit, the conduit being capable of conveying a flow of a non-Newtonian fluid such that a portion of the flow exhibits plug flow, the chamber being configured to contain the substrate such that the plug flow moves over a surface of the substrate to enable removal of particles from the surface.

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