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STABILIZATION STRUCTURE INCLUDING SACRIFICIAL RELEASE LAYER AND STAGING CAVITY

  • US 20140159065A1
  • Filed: 01/30/2013
  • Published: 06/12/2014
  • Est. Priority Date: 12/11/2012
  • Status: Active Grant
First Claim
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1. A structure comprising:

  • a carrier substrate;

    a stabilization layer including an array of staging cavities on the carrier substrate;

    an array of micro devices within the array of staging cavities;

    wherein each micro device includes a device layer, and at least a portion of a thickness of the device layer is laterally surrounded by sidewalls of a corresponding staging cavity.

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