Method of making a light emitting device and light emitting device made thereof
First Claim
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1. A method of making a light emitting device, comprising steps of:
- providing a substrate;
forming a light-emitting structure having an active layer on the substrate;
forming a protective layer having a first thickness on the light-emitting structure;
etching the protective layer such that the protective layer has a second thickness smaller than the first thickness; and
patterning the protective layer.
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Abstract
A method of manufacturing a light-emitting device comprises: providing a substrate, forming a light-emitting structure on the substrate, the light-emitting structure having an active layer; forming a protective layer on the light-emitting structure, the protective layer having a first thickness; etching the protective layer such that the protective layer has a second thickness less than the first thickness; and patterning the protective layer.
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Citations
16 Claims
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1. A method of making a light emitting device, comprising steps of:
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providing a substrate; forming a light-emitting structure having an active layer on the substrate; forming a protective layer having a first thickness on the light-emitting structure; etching the protective layer such that the protective layer has a second thickness smaller than the first thickness; and patterning the protective layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A light-emitting device, comprising:
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a substrate; a light-emitting structure on the substrate comprising a first region and a second region; and a barrier layer on the first region having a bottom surface and a sidewall; wherein an angle between the sidewall and the bottom surface is between 10°
-70°
. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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Specification