HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATION WITH FLASH LIGHT

• US 20140169772A1
• Filed: 12/12/2013
• Published: 06/19/2014
• Est. Priority Date: 12/13/2012
• Status: Abandoned Application

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: Dainippon Screen Manufacturing Company Limited (SCREEN Holdings Co., Ltd.)
• Inventors: YAMADA, Takahiro, FUSE, Kazuhiko, ABE, Makoto
• Application Number:
  US14/104,178
• Publication Number:
  US 20140169772A1
• Time in Patent Office: Days
• US Class Current: 392/418
• CPC Class Codes: H01L 21/324 Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering H01L21/20 - H01L21/288 and H01L21/302 - H01L21/322 take precedence
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: H05B 3/0047 for semiconductor manufacture

Abstract

A susceptor of a holding part for holding a semiconductor wafer includes a disc-shaped holding plate, an annular shaped guide ring, and a plurality of support pins. The guide ring has an inside diameter greater than the diameter of the semiconductor wafer and is installed on the peripheral portion of the top face of the holding plate. The guide ring has a tapered surface along the inner circumference. The semiconductor wafer before irradiated with flash light is supported by the support pins. The annular shape of the guide ring increases the contact area when the semiconductor wafer that has jumped off the susceptor and fallen when irradiated with flash light collides with the guide ring, thus reducing the impact of the collision and preventing cracks in the substrate.

Claims

1. A heat treatment apparatus for heating a disc-shaped substrate by applying flash light to the substrate, comprising:

a chamber for accommodating the substrate;

a susceptor for placing and holding the substrate thereon within the chamber,

the susceptor including;

a plate having a placement surface on which the substrate is placed;

an annular shaped guide ring installed on the plate and having an inside diameter greater than a diameter of the substrate; and

a plurality of support pins provided upright on the plate inward of the guide ring and for supporting the substrate in point contact with the substrate and

a flash lamp for applying flash light to the substrate held by the susceptor.

2. The heat treatment apparatus according to claim 1, wherein

the guide ring has a tapered surface along an inner circumference, the tapered surface tapering from above down to the plate.

3. The heat treatment apparatus according to claim 2, wherein

the tapered surface has a gradient of greater than or equal to 30 degrees and less than or equal to 70 degrees to the placement surface of the plate.

4. The heat treatment apparatus according to claim 3, wherein

the tapered surface has an average surface roughness of less than or equal to 1.6 μ

m.

5. The heat treatment apparatus according to claim 1, wherein

the guide ring has an inside diameter that is 10 to 40 mm greater than the diameter of the substrate.

6. The heat treatment apparatus according to claim 1, further comprising

a preheating part that preheats the substrate held by the susceptor before flash light is applied to the substrate.