DETECTION STRUCTURE FOR A Z-AXIS RESONANT ACCELEROMETER
First Claim
1. A detection structure for a z-axis resonant accelerometer, comprising:
- a substrate;
elastic anchorage elements;
an inertial mass anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to said plane;
first and second elastic supporting elements; and
a first resonator element and a second resonator element, mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass.
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Accused Products
Abstract
A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.
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Citations
22 Claims
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1. A detection structure for a z-axis resonant accelerometer, comprising:
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a substrate; elastic anchorage elements; an inertial mass anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to said plane; first and second elastic supporting elements; and a first resonator element and a second resonator element, mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A resonant accelerometer, comprising:
a detection structure configured to detect a component of external linear acceleration directed along a vertical axis, the detection structure including; a substrate; elastic anchorage elements; an inertial mass anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along the vertical axis that is transverse with respect to said plane; first and second elastic supporting elements; and a first resonator element and a second resonator element, mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element, respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass. - View Dependent Claims (14, 15, 16, 17, 18)
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19. An electronic apparatus, comprising:
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a control unit; and a resonant accelerometer coupled to the control unit, the accelerometer including; a detection structure configured to detect a component of external linear acceleration directed along a vertical axis, the detection structure including; a substrate; elastic anchorage elements; an inertial mass anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along the vertical axis that is transverse with respect to said plane; first and second elastic supporting elements; and a first resonator element and a second resonator element, mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element, respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass; a reading circuit coupled to the accelerometer; and a driving circuit coupled to the accelerometer. - View Dependent Claims (20, 21, 22)
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Specification